Method for preparing spherical concave mirror on optical waveguide based on laser cold working

Abstract

The invention proposes a method for preparing a spherical concave mirror on an optical waveguide based on laser cold working. A core component of adopted preparation equipment is mainly a laser shaping device, the laser shaping device is mainly composed of a mask plate and doped glass, the mask plate is light-proof, is provided with a round hole and can leak a round light beam, the doped glass istightly attached to the mask plate, and a glass doping zone is coincident with the round hole in size. One half circle of the glass doping zone has the ion high doping characteristic, and the other half circle has the distribution characteristic that the ion doping concentration gradually increases from the center of the circle in the radial direction. When the traveling laser beam passes throughthe laser shaping device, a semicircular laser beam with the light intensity gradually decreased from the center of the circle in the radial direction is generated. After the semicircular laser beam etches the optical waveguide, a strict and regular spherical concave surface is obtained, and the spherical concave surface is plated with a metal film or a medium high reflective film, and the spherical concave mirror is formed.

Description

technical field [0001] The invention relates to the field of micromachining, in particular to a method for preparing a spherical concave mirror on an optical waveguide by means of laser cold processing. Background technique [0002] In recent years, with the continuous development of big data centers, supercomputers and other fields, the electrical interconnection technology connected by copper wires has encountered a development bottleneck. At present, the industry believes that when the signal transmission rate rises to 100 Gb / s, the traditional Electrical interconnection technology has been powerless. The optical backplane interconnection technology based on the optical waveguide theory is in rapid development and has become a research hotspot in the field of information technology due to its advantages of high transmission bandwidth, low loss, low cost and immunity to electromagnetic interference. [0003] At present, fiber-optical waveguide coupling technology (paralle...

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Problems solved by technology

[0003] At present, fiber-optical waveguide coupling technology (parallel coupling and vertical coupling) is one of the key technologies in the field of optical backplane interconnection. However, there is no effective and feasible technical solution and technical standard, especially the vertical coupling technology. , has become one of the biggest problems that plague the practical application of optical backplane interconnection technology

In order to further promote the marketization of optical interconnection technology, it is necessary to solve the problem of vertical coupling technology and the problem of large coupling loss due to the numerical aperture mismatch between light sources, optical fibers, and optical waveguides.

The currently developed vertical coupling technologies mainly include tilted mirror method (application publication number: CN 105397300A) and waveguide grating coupling method (application publication number: CN 102540349A), which can preliminarily solve the vertical coupling requirements of fiber-optical waveguide. Due to the numerical aperture matching problem of optical devices, the vertical coupling efficiency is relatively low. Therefore, on this basis, the design and fabrication of embedded micro-mirror inserts for out-of-plane coupling in PCB leveloptical interconnections) and spherical concave mirror (Fabrication of concave microlens arrays by local fictive temperature modification of fused silica, application number: 201710076388.7) to further improve the vertical coupling efficiency of fiber-optical waveguide

For the preparation of concave mirrors, there are mainly methods of using carbon dioxide laser thermal ablation and ultraviolet laser cold processing and etching, but the concave mirrors prepared by these two methods are not strictly regular spherical concave surfaces, but have certain other function distributions. Spherical concave mirror, and its processing method requires strict control of processing parameters, which increases the difficulty and complexity of the process

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