A Method of Fabricating Spherical Concave Mirrors on Optical Waveguides Based on Laser Cold Processing

Abstract

The invention proposes a method for preparing a spherical concave mirror on an optical waveguide based on laser cold processing. The core component of the preparation equipment used is mainly a laser shaping device, which is mainly composed of a mask plate that is opaque, has a round hole, and can leak a circular beam, and a doped glass that is close to the mask plate. The size of the impurity area is the same as that of the circular hole. One half of the circle has the characteristics of high ion doping, and the other half of the circle has the distribution characteristics of increasing ion doping concentration from the center of the circle along the radial direction. When the advancing laser beam passes through the laser shaping device, a semicircular laser beam with light intensity decreasing radially from the center of the circle is generated. When the semicircular laser beam etches the optical waveguide, a strictly regular spherical concave surface is obtained, and the spherical concave surface is coated with a metal film or a dielectric high-reflection film to form a spherical concave mirror.

Description

technical field [0001] The invention relates to the field of micromachining, in particular to a method for preparing a spherical concave mirror on an optical waveguide by means of laser cold processing. Background technique [0002] In recent years, with the continuous development of big data centers, supercomputers and other fields, the electrical interconnection technology connected by copper wires has encountered a development bottleneck. At present, the industry believes that when the signal transmission rate rises to 100Gb / s, the traditional electrical interconnection Interconnect technology is powerless. The optical backplane interconnection technology based on the optical waveguide theory is in rapid development and has become a research hotspot in the field of information technology due to its advantages of high transmission bandwidth, low loss, low cost and immunity to electromagnetic interference. [0003] At present, fiber-optical waveguide coupling technology (p...

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Problems solved by technology

[0003] At present, fiber-optical waveguide coupling technology (parallel coupling and vertical coupling) is one of the key technologies in the field of optical backplane interconnection. However, there is no effective and feasible technical solution and technical standard, especially the vertical coupling technology. , has become one of the biggest problems that plague the practical application of optical backplane interconnection technology

In order to further promote the marketization of optical interconnection technology, it is necessary to solve the problem of vertical coupling technology and the problem of large coupling loss due to the numerical aperture mismatch between light sources, optical fibers, and optical waveguides.

The currently developed vertical coupling technologies mainly include tilted mirror method (application publication number: CN105397300A), waveguide grating coupling method (application publication number: CN 102540349A), etc., which can preliminarily solve the vertical coupling requirements of fiber-optical waveguide, but the resulting The numerical aperture matching problem of optical devices makes the vertical coupling efficiency relatively low. Therefore, on this basis, the design and fabrication of embedded micro-mirror inserts for out-of-plane coupling in PCB leveloptical interconnections has been developed. , Micro-Optics2010) and spherical concave mirrors (Fabrication of concave microlens arrays by local fictive temperature modification offusedsilica, Optics Letters, 42(6), 2017) to further improve the vertical coupling efficiency of fiber-optical waveguide

For the preparation of concave mirrors, there are mainly methods of using carbon dioxide laser thermal ablation and ultraviolet laser cold processing and etching, but the concave mirrors prepared by these two methods are not strictly regular spherical concave surfaces, but have certain other function distributions. Spherical concave mirror, and its processing method requires strict control of processing parameters, which increases the difficulty and complexity of the process

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