Terahertz wave modulator based on strontium titanate all-dielectric metamaterial and preparation method of terahertz wave modulator

A technology of terahertz waves and strontium titanate, which is applied in instruments, nonlinear optics, optics, etc., can solve the problems of small power load, high temperature ablation, high frequency loss, etc., and achieve large modulation depth, large modulation depth, The effect of low loss
CN110320678AActive Publication Date: 2019-10-11SHANGHAI NORMAL UNIVERSITY
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
SHANGHAI NORMAL UNIVERSITY
Publication Date
2019-10-11

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Abstract

The invention relates to a terahertz wave modulator based on a strontium titanate all-dielectric metamaterial and a preparation method of the terahertz wave modulator. The terahertz wave modulator comprises a polymer flexible substrate layer, a doped semiconductor epitaxial layer and a SiO2 insulation-strontium titanate micro-structure composite layer, wherein the doped semiconductor epitaxial layer grows on the surface of the polymer flexible substrate layer; the SiO2 insulation-strontium titanate micro-structure composite layer grows on the semiconductor silicon epitaxial layer and comprisesa lower SiO2 insulating layer and a strontium titanate micro-structure layer growing on the SiO2 insulating layer. Compared with the prior art, the prepared modulator has the advantages that the quality factor is high, the adjustability is good, the modulation depth is large, the preparation process is relatively simple, and the modulator is suitable for large-scale production and application.
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Description

Technical field

[0001] The invention belongs to the technical field of semiconductor optoelectronic materials and devices, and relates to a terahertz wave modulator based on strontium titanate all-dielectric metamaterial and a preparation method thereof. Background technique

[0002] Terahertz (THz) waves are between microwave and infrared radiation in the electromagnetic spectrum, and are in the transition region from macro-electromagnetic theory to micro-quantum theory. It has many advantages such as bandwidth, high transmission rate, strong directionality, and high security. It has broad prospects in basic research and practical applications. For example, compared to the microwave band, THz wave has the characteristics of high frequency, large signal bandwidth and high resolution, which is suitable for ultra-wideband and ultra-high-speed 5G communication technology. 0.12THz and 0.22THz have been used as the next generation of terrestrial wireless communication and inter-satell...

Claims

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