Coated pressure sensor based on PDMS material and preparation method thereof

Abstract

The invention discloses a coated pressure sensor based on a PDMS material and a preparation method thereof, and belongs to the technical field of flexible pressure sensors. The technical problem to besolved is to provide an improvement of a coated pressure sensor structure based on a PDMS material and a preparation method thereof. In order to solve the technical problem, the technical scheme as follows is adopted: the coated pressure sensor comprises a sponge composite framework serving as a three-dimensional porous frame, the surface of the three-dimensional porous structure of the sponge composite framework is coated with a PDMS material, and the sponge composite framework is also filled with a conductive nano material; electrodes are arranged on the two sides of the sponge composite framework respectively, and the electrodes are bonded to the surface of the sponge composite framework through PDMS films; and the electrodes are specifically conductive adhesive tapes coated with conductive silver paste on the surfaces. The method is used to manufacture a flexible tactile sensor.

Description

technical field [0001] The invention discloses a coated pressure sensor based on PDMS material and a preparation method thereof, belonging to the technical field of flexible pressure sensors. Background technique [0002] Electronic skin is one of the most cutting-edge directions in the research of smart materials and sensors, and it is also an emerging field in the development of the contemporary electronic information industry. It is an important way for robots to perceive the external environment information and is one of the necessary media for robots to directly interact with the external environment or targets. The development of electronic skins with tactile perception functions is crucial to future robots exploring physics The world has important scientific significance and application value. [0003] With the development of science and technology and the continuous improvement of production and preparation technology, higher requirements are put forward for robot t...

AI Technical Summary

Problems solved by technology

[0003] With the development of science and technology and the continuous improvement of production and preparation technology, higher requirements are put forward for robot tactile sensors in terms of functional structure and appearance characteristics. Flexible tactile sensors with characteristics such as tactile perception have become a research hotspot for electronic skin; traditional silicon-based and metal strain gauge tactile sensors cannot meet the functional requirements of flexibility, ductility, and wearing comfort, so nano-conductive materials are filled in flexible substrates. The preparation of force-sensitive conductive composites is widely used in the design of flexible tactile sensors

[0004] According to different working principles, flexible tactile sensors can be roughly divided into photoelectric, piezoelectric, resistive, and capacitive types. Among them, capacitive flexible tactile sensors have high sensitivity, high precision, fast response rate, small hysteresis, and are easy to use. Integration and other advantages are widely used in the research of electronic skin for intelligent robots; the sensitivity of traditional flexible tactile sensors based on composite materials is low in the low-voltage region. It is a common method to improve the tactile detection sensitivity of robotic electronic skin. The common microstructures mainly include pyramid, tentacle-shaped, concave-convex, microneedle structure, etc. Usually, when designing the microstructure of the sensitive layer, the preparation process often requires complex processes. , such as lithography, sputtering, evaporation, etching, etc., and there are disadvantages such as not being easy to produce on a large scale

[0005] The common preparation methods of three-dimensional porous microstructure composite conductive materials are: vacuum freeze-drying method and chemical vapor deposition method; the vacuum freeze-drying method is also called sublimation drying, and its principle is to dry the wet material or solution at a lower temperature (-50 ° C ~ -10°C) to freeze into a solid state, and then under vacuum (1.3-12Pa), the water in it is directly sublimated into a gaseous state without liquid state to achieve the purpose of drying. The flexible tactile sensor prepared by this method can achieve higher detection Sensitivity (~0.8kPa-1), low detection limit (~0.24Pa), fast response (~100ms), etc.; but the vacuum freeze-drying method has disadvantages such as expensive equipment, energy consumption and high cost of material preparation;

[0006] Chemical vapor deposition (CVD) usually uses a three-dimensional nickel foam material as a template to chemically vapor-deposit conductive materials such as graphene on the three-dimensional framework, and then remove the foam nickel framework by chemical etching to obtain a three-dimensional porous microstructure graphene conductive foam. , the flexible tactile sensor prepared by this method can realize high sensitivity (gauge factor GF=35), fast response (~30ms), good stability (cycle number>5000) tactile perception function; but chemical vapor deposition generally has deposition The rate is not high, the deposition process is easy to pollute the surface of the film and the environment, etc., and the equipment often has corrosion resistance requirements

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