Flexible photoelectric detector based on layered transition metal sulfide and preparation method thereof

A photodetector and transition metal technology, applied in the field of microelectronics, can solve the problems of difficult control of the distance of the metal electrode channel, irregular pattern of the patterned metal electrode, uneven thickness of the photosensitive film, etc., and achieves low cost and simple preparation process. , good flexibility

Active Publication Date: 2020-01-10
XIAN TECHNOLOGICAL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] In view of this, the present invention provides a layered transition metal sulfide-based The flexible photodetector and its preparation method, which add a thickener to the transition metal sulfide dispersion, prepare a uniform nano-film by spin coating, and prepare it with square hole copper meshes of different specifications as hard masks

Method used

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  • Flexible photoelectric detector based on layered transition metal sulfide and preparation method thereof
  • Flexible photoelectric detector based on layered transition metal sulfide and preparation method thereof
  • Flexible photoelectric detector based on layered transition metal sulfide and preparation method thereof

Examples

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Effect test

Embodiment 1

[0079] 1) MoS prepared by physical vapor deposition 2 (Shanghai Aladdin Biochemical Technology Co., Ltd.), isopropanol, and ethyl cellulose are configured in a polytetrafluoroethylene planetary ball mill jar with a capacity of 100ml according to the ratio of 1g: 10ml: 0.1g;

[0080] 2) Add 10 agate grinding balls with a diameter of 10mm and 70 agate balls with a diameter of 5mm, and put them into a planetary ball mill for sealing;

[0081] 3) Adjust the rotational speed of the ball mill to 300r / min, use the forward rotation for 25min, stop for 5min, reverse for 25min, stop for 5min, cycle operation mode, and ball mill for 72h to obtain MoS 2 suspension;

[0082] 4) Cut the flexible PET into a square of 1cm×1cm, ultrasonically clean it with absolute ethanol and deionized water for 10 minutes, and dry it with a nitrogen gun to obtain a flexible PET substrate;

[0083] 5) The flexible PET substrate is vacuum-adsorbed at the center of the homogenizer, and the speed of the homoge...

Embodiment 2

[0092] 1) WS prepared by supersonic jet milling 2 (Shanghai Aladdin Biochemical Technology Co., Ltd.), isopropanol, and ethyl cellulose are configured in a polytetrafluoroethylene planetary ball mill jar with a capacity of 100ml according to the ratio of 1.55g: 10ml: 0.1g;

[0093] 2) Add 10 agate grinding balls with a diameter of 10mm and 75 agate balls with a diameter of 5mm, and put them into a planetary ball mill for sealing;

[0094] 3) Adjust the rotational speed of the ball mill to 200r / min, use the forward rotation for 20min, stop for 8min, reverse for 20min, stop for 8min, cycle operation mode, ball mill for 80h, and get WS 2 suspension;

[0095]4) Cut the flexible PVC into a square of 1cm×1cm, ultrasonically clean it with absolute ethanol and deionized water for 10 minutes, and dry it with a nitrogen gun to obtain a flexible PVC substrate;

[0096] 5) Vacuum absorb the flexible PVC substrate at the center of the homogenizer, set the speed of the homogenizer to 3000...

Embodiment 3

[0105] 1) Preparation of MoS by hydrothermal method 2 For flower-shaped nanospheres, dissolve 4mmol ammonium paramolybdate and 6.3mmol thiourea in 30ml deionized water, use concentrated hydrochloric acid to adjust the pH value to 2, seal it in a high-pressure reactor, and react at 200°C for 24h to obtain water Thermally prepared MoS 2 ;

[0106] 2) MoS 2 , isopropanol, and ethyl cellulose are configured in a polytetrafluoroethylene planetary ball mill jar with a capacity of 100ml according to the ratio of 1g: 10ml: 0.1g;

[0107] 3) Add 10 agate grinding balls with a diameter of 10mm and 70 agate balls with a diameter of 5mm, and put them into a planetary ball mill for sealing;

[0108] 4) Adjust the rotational speed of the ball mill to 450r / min, use the forward rotation for 30min, stop for 10min, reverse for 30min, stop for 10min, cycle operation mode, and ball mill for 3h to obtain MoS 2 suspension;

[0109] 5) Cut the flexible PI into a square of 1cm×1cm, ultrasonicall...

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Abstract

The invention relates to the technical field of microelectronics, in particular to a flexible photoelectric detector based on layered transition metal sulfide and a preparation method thereof. The photoelectric detector is formed by sequentially stacking a flexible substrate, a transition metal sulfide film and a metal electrode from bottom to top. The preparation method comprises the following steps: the transition metal sulfide is prepared by a hydrothermal method or a physical vapor deposition method which is low in cost and can be produced on a large scale. A dispersing agent and a thickening agent are added to the transition metal sulfide; the material is dispersed by adopting a ball-milling method to form a transition metal sulfide dispersion liquid; a layer of transition metal sulfide nano-film is formed on a flexible substrate by adopting a spin-coating method; and finally, a metal electrode is prepared by adopting a vacuum coating method by taking a copper net as a hard mask plate. The flexible photoelectric detector is simple in preparation process, high in yield, low in cost and good in flexibility.

Description

technical field [0001] The invention relates to the technical field of microelectronics, in particular to a flexible photodetector based on a layered transition metal sulfide and a preparation method thereof. Background technique [0002] Layered transition metal sulfides are planar two-dimensional materials with a graphene-like structure. Layers are bonded together by weak van der Waals forces, and each monolayer relies on strong co- Formed by valence bonds. MX2 (M=Mo, W, Nb, Ti, etc.; X=S, Se, Te) type transition metal chalcogenides have a graphite-like layered hexagonal close-packed structure, and have a narrow band gap, so in the light , electricity, lubrication, catalysis and other aspects also show excellent performance. Among them, molybdenum disulfide (MoS 2 ) and tungsten disulfide (WS 2 ) is the most typical representative of transition metal dichalcogenides. [0003] With the development of science and technology, people are constantly pursuing portable weara...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/032H01L31/0392H01L31/108H01L31/18
CPCH01L31/032H01L31/03926H01L31/108H01L31/18Y02P70/50
Inventor 坚佳莹董芃凡常洪龙坚增运
Owner XIAN TECHNOLOGICAL UNIV
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