Self-suction type X-ray generating device and application thereof

Abstract

The invention discloses a self-suction type X-ray generating device and application thereof. The device comprises an insulating shell, a cathode, an anode, a grid, at least one adsorption metal plateand at least one sputtering metal plate, the cathode is packaged in the insulating shell and is used for releasing electrons; the anode is packaged in the insulating shell, the anode comprises a target body and a target surface, and electrons released by the cathode collide with the target surface to release X-rays; the at least one adsorption metal plate and the at least one sputtering metal plate are arranged in parallel, each adsorption metal plate and the sputtering metal plate adjacent to the adsorption metal plate form one group of ion sputtering structures, there is at least one group of the ion sputtering structures, the at least one group of the ion sputtering structures are located at the at least one side of the cathode, and the plane directions of the at least one adsorption metal plate and the at least one sputtering metal plate are parallel to the electron release direction of the cathode; and the gate may be disposed on the at least one adsorption metal plate or the at least one sputtering metal plate or disposed separately. By introducing the ion sputtering structures, residual gas molecules in the X-ray tube are adsorbed while the X-ray tube emits, and a better vacuum degree is obtained.

Description

technical field [0001] The invention is used in the technical field of X-rays, and relates to a self-inhalation X-ray generating device and its application, which can effectively improve the vacuum degree of vacuum electronic devices. Background technique [0002] Since its discovery, X-rays have been widely used in medical imaging, industrial inspection, material analysis, security inspection and other fields, and play a huge role in daily life and industrial production. Although there are many ways to obtain X-rays, the most important form of application is to accelerate the electron beam bombardment of the anode target in a vacuum environment. In this process, the electron beam needs to fly a certain distance in vacuum, so as to realize the emission, focusing, acceleration, and other beam shape processing of the electron beam. Since the anode high voltage of the X-ray tube is generally between tens and hundreds of kilovolts, the electrical insulation between the anode an...

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Problems solved by technology

However, the above two methods have certain disadvantages: the getter has an adsorption effect on gas molecules with high chemical activity, but has no adsorption capacity for inert gases such as helium (He) and argon (Ar), and there are powder falling and occasional outgassing and other disadvantages; the vacuum exhaust device in the open structure increases the volume and design complexity of the ray tube, and is easy to introduce mechanical vibration, which affects the imaging effect of the ray tube and increases the manufacturing cost of the ray tube

[0005] From the above description, it can be seen that in terms of maintaining the vacuum inside the X-ray tube, no matter whether the getter or the vacuum exhaust device is used, there are certain disadvantages.

And in recent years, with the emergence of cold-cathode X-ray tubes, higher requirements have been put forward for its internal vacuum, which makes the vacuum maintenance of X-ray tubes face more challenges.

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