A Pressure Sensing Device Based on Surface Plasmon Lattice Resonance
A surface plasmon, pressure sensor technology, applied in the field of integrated optics and pressure sensing, can solve the problems of difficult to control the modification performance, increase the production cost, etc., achieve accurate detection, improve stability, and optimize the preparation process. Effect
Active Publication Date: 2021-12-03
SHENZHEN INST OF ADVANCED TECH CHINESE ACAD OF SCI
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Patent CN108195494A uses a reactive ion etching machine to modify the hydrophilic surface to achieve anisotropic etching of silicon and polymers, which increases the production cost and is difficult to control the modification performance
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[0028] In order to enable those skilled in the art to better understand the solutions of the present invention, the following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only It is an embodiment of a part of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present invention.
[0029] Surface plasmon, belonging to the category of nanophotonics, is a surface wave mode localized at the metal-medium interface, which can control the propagation behavior of light in the nanometer range, that is, the traditional optical diffraction limit can be broken through . Surface plasmons provide a platform to manipulate ...
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Abstract
The invention relates to a pressure sensor based on surface plasmon lattice resonance, which includes an upper silicon substrate, a nanostructure unit array located below the upper silicon substrate, and a lower metal plate, and the nanostructure unit is formed from top to bottom The top metal ridge, the middle layer dielectric column and the bottom metal ridge arranged in sequence are closely superimposed; the lower metal plate is arranged below the bottom metal ridge, and the lower metal plate and the bottom metal ridge are at a certain distance dFixed settings. The external pressure will act on the lower metal plate, and then change the size of the device structure interval d, thereby causing the change of the surface plasmon resonance wavelength, and converting the pressure signal into an optical signal for detection. The optical device structure of the present invention greatly improves the stability of the measurement system, can realize accurate detection of tiny deformation pressure, and reduces the influence of temperature, humidity and electromagnetic interference on system signal drift.
Description
technical field [0001] The invention belongs to the technical field of integrated optics and pressure sensing technology, in particular to a pressure sensing device based on surface plasmon lattice resonance. Background technique [0002] At present, terminals have higher and higher requirements for the performance and application of sensors. The miniaturization, high integration, high sensitivity, and fast response of sensors have become important indicators to measure the performance of new sensor designs. Since the plasmonic surface lattice resonance supported by the metal nanoparticle array has narrow linewidth and enhanced local field, it is very beneficial to the acquisition of the above-mentioned new sensor indicators, which makes it useful in nanolasers, biochemical sensors and nonlinear Very attractive in various applications including optics. With the development of nanotechnology, nano-optical sensors designed by further integrating optical and fiber optic senso...
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IPC IPC(8): G01L1/24B82Y15/00B82Y30/00
CPCB82Y15/00B82Y30/00G01L1/24
Inventor 刘国泉石云杰李光元董玉明焦国华
Owner SHENZHEN INST OF ADVANCED TECH CHINESE ACAD OF SCI