Method and equipment for batch production of AR diffracted optical waveguides

Abstract

The invention provides a method and equipment for batch production of AR diffracted optical waveguides. According to the invention, low-cost batch production of large-area AR diffractive optical waveguides (surface embossment tilted gratings) in any shape can be realized, two-photon polymerization micro-nano 3D printing is adopted to achieve manufacturing of the tilted grating large-area mother set in any shape (on one hand, the problem of manufacturing of the tilted grating mother set in any shape is solved, on the other hand, direct manufacturing of the large-size wafer-level mother set canbe achieved, and the advantages of being low in manufacturing cost and high in production efficiency are further achieved). By adopting a composite nanoimprint lithography technology (combining with an imprint special suitable for an inclined grating imprint process and a composite soft mold), the problem that an inclined grating with a large inclination angle and a large groove depth cannot be manufactured due to the fact that demolding cannot be conducted is solved, and unconstrained (geometrical shape and size) manufacturing of the inclined grating is achieved.

Description

technical field [0001] The disclosure belongs to the technical fields of augmented reality AR, micro-nano manufacturing, and additive manufacturing (3D printing), and specifically relates to a method and equipment for batch production of AR diffractive optical waveguides, and in particular to a method capable of realizing large-area AR diffractive light of arbitrary shape. A method and device for low-cost mass production of waveguides (surface relief tilted gratings). Background technique [0002] The statements in this section merely provide background information related to the present disclosure and do not necessarily constitute prior art. [0003] Augmented Reality (AR for short) is a new technology that ingeniously integrates virtual information with the real world. It integrates multimedia, 3D modeling, real-time tracking and registration, intelligent interaction, sensing and other technologies. The generated text, images, 3D models, music, video and other virtual inf...

AI Technical Summary

Problems solved by technology

This solution faces great limitations and constraints both in the manufacture of master molds and in the manufacture of tilted grating optical waveguides. For example, the combination of electron beam lithography and etching processes can only manufacture very small area masters, and for all Manufactured tilted gratings can only limit a certain geometric feature size (small tilt angle and small groove depth, etc.), especially facing the problems of high manufacturing cost and long production cycle

In addition, the existing nanoimprint technology is only suitable for inclined grating structures with small inclination angles and small groove depths. Slanted gratings with large inclination angles and large groove depths are difficult or even impossible to demould, and cannot be manufactured at all. out

Moreover, there are still problems such as small imprinting area, easy damage to the mold, and many demoulding defects.

Therefore, whether it is for the design of the inclined grating or mass production, it is difficult to solve the problem

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