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A polishing liquid for zinc oxide crystal oxygen surface polishing and preparation method thereof

A technology of polishing fluid and zinc oxide, which is applied in the direction of polishing compositions containing abrasives, etc., can solve the problems of low polishing efficiency of oxygen-containing crystal surfaces and easy occurrence of orange peel phenomenon, so as to promote removal, improve surface quality, and improve polishing efficiency effect

Active Publication Date: 2021-08-27
宁波日晟新材料有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In view of the above deficiencies in the prior art, the object of the present invention is to provide a polishing liquid for oxygen surface polishing of zinc oxide crystals and a preparation method thereof, so as to solve the problem of low polishing efficiency of the oxygen-containing crystal surface of zinc oxide crystals, and the surface is easy to The technical problem of orange peel phenomenon; at the same time, the polished surface has no pits and scratches, which fully meets the production requirements of subsequent electronic components

Method used

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  • A polishing liquid for zinc oxide crystal oxygen surface polishing and preparation method thereof

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preparation example Construction

[0034] Correspondingly, as above-mentioned the preparation method of the polishing liquid that is used for zinc oxide crystal oxygen surface polishing, it comprises the following steps:

[0035] S1: Weigh a fixed amount of abrasive and add it to a fixed amount of deionized water, stir evenly, then add a fixed amount of electrolyte and surfactant, and stir evenly;

[0036] S2: Finally, add a pH regulator, adjust the pH value to 2.5-6.0, and stir well to obtain the polishing solution for polishing the oxygen surface of the zinc oxide crystal.

[0037] The abrasive of the present invention is preferably a nano-composite particle with a core-shell structure; the ionized acrylic acid derivative resin shell has good hydrophilic and lipophilic balance, which is conducive to the environmental stability of the charge, and is easy to form on the surface of the abrasive particle. The electric double layer increases the electrostatic repulsion between particles, thereby weakening the tend...

Embodiment 1

[0042] This embodiment is used for the polishing liquid of zinc oxide crystal oxygen surface polishing, and described polishing liquid is made up of following raw material: abrasive material, electrolyte, tensio-active agent and deionized water; And adopt pH adjusting agent to adjust the pH value of described polishing liquid to 4.8.

[0043] The mass percentages of each component in the polishing liquid in the raw materials are: 26%wt of abrasive, 3%wt of electrolyte, 26%wt of surfactant, and the balance is deionized water.

[0044] The abrasive is a nanocomposite particle with a core-shell structure, the core of the nanocomposite particle with a core-shell structure is silicon oxide and cerium oxide, and the outer shell is an ionized acrylic acid derivative resin. The mass ratio of silicon oxide and cerium oxide is It is 5:1.

[0045] The electrolyte is composed of organic carboxylate and organic sulfonate with a mass ratio of 1:1.

[0046]The surfactant is composed of ani...

Embodiment 2

[0049] This embodiment is used for the polishing liquid of zinc oxide crystal oxygen surface polishing, and described polishing liquid is made up of following raw material: abrasive material, electrolyte, tensio-active agent and deionized water; And adopt pH adjusting agent to adjust the pH value of described polishing liquid to 2.5.

[0050] The mass percentages of each component in the polishing liquid in the raw materials are: 12%wt of abrasive, 5%wt of electrolyte, 18%wt of surfactant, and the balance is deionized water.

[0051] The abrasive is a nano-composite particle with a core-shell structure, the core-shell structure of the nano-composite particle is silicon oxide and titanium oxide, and the shell is an ionized acrylic acid derivative resin. The mass ratio of silicon oxide and cerium oxide is It is 3:1.

[0052] The electrolyte consists of organic carboxylate and organic sulfonate with a mass ratio of 2:3.

[0053] The surfactant is composed of anionic silicone su...

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Abstract

The invention discloses a polishing liquid for polishing the oxygen surface of a zinc oxide crystal. The polishing liquid is composed of the following raw materials: abrasive material, electrolyte, surfactant and deionized water; The pH was adjusted to 2.5‑6.0. The polishing solution of the present invention solves the technical problems of low polishing efficiency of the oxygen-containing crystal surface of the zinc oxide crystal and orange peel phenomenon on the surface; at the same time, the polished surface has no pits and scratches, which fully meets the requirements of the subsequent electronic components. Production requirements. The invention also discloses a preparation method of the polishing liquid used for polishing the oxygen surface of the zinc oxide crystal.

Description

technical field [0001] The invention relates to the technical field of polishing materials for the oxygen surface of zinc oxide crystals, in particular to a polishing liquid for polishing the oxygen surface of zinc oxide crystals and a preparation method thereof. Background technique [0002] The development goal of modern manufacturing industry is the intelligent manufacturing of Industry 4.0. The crown of intelligent manufacturing is ultra-precision manufacturing, and the pearl of the crown of ultra-precision surface is the processing of ultra-precision and non-damaged surface. For example, the manufacture of ultra-large integrated circuit chips has entered the 7-nanometer node. In this ultra-precision manufacturing process, the characteristics of the device are at the nanometer level, which is close to the human neuron system. The fabrication of state-of-the-art VLSI chips cannot be accomplished without the assurance of ultra-precise surface processing. At present, the p...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C09G1/02
CPCC09G1/02
Inventor 孙韬
Owner 宁波日晟新材料有限公司