Substrate for terahertz meta-material construction, terahertz meta-material and preparation method

A metamaterial and terahertz technology, applied in the direction of additive processing, etc., can solve the problems of inapplicable terahertz metamaterial construction, long production cycle, high processing cost, etc., to achieve large-scale production application, low production cost, and high molding efficiency high effect

Inactive Publication Date: 2020-04-17
SHENZHEN GRADUATE SCHOOL TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] At present, due to the relatively mature processing technology of silicon wafers, silicon wafers are mostly used as substrates in the construction of terahertz metamaterials, but the traditional photolithography process is limited to silicon materials, with high processing costs, long production cycles, cumbersome steps, and difficult deep processing. , and has high requirements for the processing environment, which will produce hydrofluoric acid and other environmental pollution, which limits the large-scale application and development of terahertz metamaterials
For ceramic substrates, because the traditional ceramic substrate preparation process can only be processed to about 300 μm by ultra-fine grinder, if the grinder is thinner, the ceramic sheet will be crushed. Therefore, the ceramic substrate prepared by the existing ceramic substrate process is often not Suitable for the construction of terahertz metamaterials

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] A substrate for terahertz metamaterial construction, the preparation method of which comprises the following steps:

[0027] S1. According to the mass ratio of 70:3:27, weigh titanium oxide, binder PVA (polyvinyl alcohol) and solvent water; then use the ball milling process to mix evenly to prepare a slurry;

[0028] S2. The slurry prepared in step S1 is formed by 3D printing technology, and the forming thickness is 10 μm to 3 mm; then flattened with a ceramic plate, and then dried to obtain a semi-finished ceramic sheet;

[0029] S3. Sintering the semi-finished ceramic sheet produced in step S2. Specifically, first raise the temperature to 600° C. at a heating rate of 5° C. / min, keep it warm for 2 hours, then continue to raise the temperature at a heating rate of 5° C. / min to 1500° C., and keep it warm for 3 hours. After cooling to room temperature, the solid-state reaction sintering method is used to solidify the semi-finished titanium oxide ceramic sheet to form a su...

Embodiment 2

[0034] A substrate for terahertz metamaterial construction, the preparation method of which comprises the following steps:

[0035] S1. According to the mass ratio of 60:4:36, weigh alumina, binder PVA (polyvinyl alcohol) and solvent water; then use ball milling process to mix evenly to prepare slurry;

[0036] S2. The slurry prepared in step S1 is formed by 3D printing technology, and the forming thickness is 10 μm to 3 mm; then flattened with a ceramic plate, and then dried to obtain a semi-finished ceramic sheet;

[0037] S3. Sintering the semi-finished ceramic sheet produced in step S2. Specifically, first raise the temperature to 600° C. at a heating rate of 5° C. / min, keep it warm for 2 hours, and then continue to raise the temperature at a heating rate of 5° C. / min to 1600° C., and keep it warm for 3 hours. After cooling to room temperature, the solid-state reaction sintering method is used to solidify the semi-finished alumina ceramic sheet to form a substrate for the ...

Embodiment 3

[0042] A substrate for terahertz metamaterial construction, the preparation method of which comprises the following steps:

[0043] S1. According to the mass ratio of 65:3:32, weigh silicon oxide, binder PVDF (polyvinylidene fluoride) and ethanol solvent, and use the ball milling process to mix evenly to prepare a slurry;

[0044] S2. The slurry prepared in step S1 is formed by 3D printing technology, and the forming thickness is 10 μm to 3 mm; then flattened with a ceramic plate, and then dried to obtain a semi-finished ceramic sheet;

[0045] S3. Sintering the semi-finished ceramic sheet produced in step S2. Specifically, first raise the temperature to 600° C. at a heating rate of 5° C. / min, keep it warm for 2 hours, then continue to raise the temperature at a heating rate of 5° C. / min to 1550° C., and keep it warm for 3 hours. After cooling to room temperature, the semi-finished silicon oxide ceramic sheet is solidified by solid state reaction sintering method to form a sub...

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Abstract

The invention discloses a substrate for terahertz meta-material construction, a terahertz meta-material and a preparation method. The preparation method of the substrate for terahertz meta-material construction comprises the following steps: uniformly mixing a target ceramic substrate material with a binder and a polar solvent to prepare slurry; molding the slurry through a 3D printing technology,and then performing drying treatment to obtain a semi-finished ceramic chip product; and finally, sintering the semi-finished ceramic chip product. The preparation method is simple in process, shortin production period, high in forming efficiency, low in production cost and suitable for preparing small-size substrates; and the prepared substrates are suitable for constructing terahertz metamaterials, and large-scale production and application of the terahertz metamaterials are facilitated.

Description

technical field [0001] The present invention relates to the technical field of material preparation, in particular to a substrate for the construction of terahertz metamaterials, terahertz metamaterials and a preparation method. Background technique [0002] Terahertz (THz) is an electromagnetic wave whose frequency lies between the microwave and infrared spectral regions. With the development of optoelectronic technology and low-scale semiconductor technology, countries and their research institutes have conducted extensive and in-depth research on terahertz electromagnetic waves. Terahertz electromagnetic waves have good development prospects in the fields of disease detection, environmental protection, anti-drug and anti-terrorism, security inspection and national defense, space exploration and interstellar communication. While carrying out research on the application of terahertz waves, the development of terahertz absorbing materials has also emerged as the times requi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/10C04B35/14C04B35/46C04B35/468C04B35/622C04B41/91B33Y70/00B33Y80/00
CPCC04B35/46C04B35/10C04B35/14C04B35/468C04B35/622C04B41/009C04B41/5338C04B41/91B33Y70/00B33Y80/00C04B2235/6026C04B2235/602C04B2235/656C04B2235/6562C04B2235/6567
Inventor 李勃曾新喜张晗王荣朱朋飞周济
Owner SHENZHEN GRADUATE SCHOOL TSINGHUA UNIV
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