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Online monitoring equipment and monitoring method for perovskite solar cell production process

A solar cell and production process technology, applied in circuits, photovoltaic power generation, electrical components, etc., can solve the problems of thin film uniformity, poor repeatability, affecting battery efficiency, and repeatability to be improved, and achieve the effect of improving repeatability

Pending Publication Date: 2020-05-19
HANGZHOU MICROQUANTA SEMICON CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The solution method is easy to operate, but the uniformity and repeatability of the film are poor, which affects the efficiency of the battery
Gas-phase methods include dual-source co-evaporation method, gas-phase assisted solution method, and chemical vapor deposition (CVD). Batch-to-batch repeatability could be improved

Method used

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  • Online monitoring equipment and monitoring method for perovskite solar cell production process
  • Online monitoring equipment and monitoring method for perovskite solar cell production process
  • Online monitoring equipment and monitoring method for perovskite solar cell production process

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specific Embodiment

[0027] (1) Clean a 5×5cm ITO glass plate with detergent, deionized water, acetone, and isopropanol for 30 minutes, and then use N 2 After drying, it was treated with UV O-zone for 10 minutes.

[0028] (2) Scrape-coat PEDOT:PSS aqueous solution on the above ITO glass to prepare a hole transport layer.

[0029] (3) Preparation of metal halide thin film precursor solution: Dissolve 461mg of PbI2 in 1mL of DMF solution (1mmol), heat and stir at 60°C for 2h, dissolve and set aside.

[0030] (4) Preparation of PbI by slot coating using prepared precursor solution 2 film.

[0031] (5) Place the prepared metal halide film in a vacuum evaporation chamber, and use a vacuum pump to control the air pressure at 10 -5 Pa~10 5 Pa, the evaporation source is methylammonium iodide (MAI). 2 Thin film reaction generates perovskite thin film MAPbI 3 .

[0032] (6) During the above reaction process, the surface of the perovskite solar cell substrate is irradiated with X-rays once per minute,...

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Abstract

The invention relates to online monitoring equipment for a perovskite solar cell production process. The online monitoring equipment comprises an X-ray photoelectron spectroscopy analysis system, an electronics system and an analytical statistics system, the X-ray photoelectron spectroscopy analysis system comprises an X-ray source, an electronic lens and an electronic energy analyzer; an electrondetector is arranged in the electron energy analyzer; X-rays emitted by the X-ray source irradiate the surface of the perovskite solar cell substrate to generate photo-induced electrons; the electronic lens receives the photoelectrons and transmits the photoelectrons to the electronic detector, the electronic detector transmits detected photoelectron signals to the analysis and statistics systemthrough the electronics system, and analysis data of the analysis and statistics system are fed back to the evaporation control system. The invention further provides a monitoring method by using theonline monitoring equipment for the perovskite solar cell production process. By monitoring the performance parameters of the perovskite thin film in the production process, the reaction process is controlled, and the repeatability of perovskite thin film production of each batch is improved.

Description

technical field [0001] The invention relates to the technical field of solar cell production equipment, in particular to an on-line monitoring device and a monitoring method for the production process of perovskite solar cells. Background technique [0002] A solar cell is a photoelectric conversion device that uses the photovoltaic effect of semiconductors to convert solar energy into electrical energy. So far, solar power has become the most important renewable energy besides hydropower and wind power. The semiconductors currently used for commercialization include monocrystalline silicon, polycrystalline silicon, amorphous silicon, cadmium telluride, copper indium gallium selenide, etc., but most of them consume a lot of energy and cost. [0003] In recent years, a perovskite solar cell has received widespread attention. This perovskite solar cell uses an organic metal halide as the light absorbing layer, and its crystal structure is ABX 3 type cubic octahedral struct...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L51/48H01L21/66
CPCH01L22/12H10K71/70H10K30/10Y02E10/549Y02P70/50
Inventor 不公告发明人
Owner HANGZHOU MICROQUANTA SEMICON CO LTD
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