Cooling liquid used in cutting process, preparation method and application thereof

Abstract

The invention relates to a cooling liquid used in a cutting process, a preparation method and application thereof. The cooling liquid comprises the following components in percentage by mass: 70-80% of a dispersing agent, 0.1-3% of a stabilizing agent, 0.1-0.5% of an antioxidant acid agent and the balance of deionized water, wherein the dispersing agent comprises alkynol-terminated polyoxyethyleneether. According to the invention, the components are reasonably matched, so that the cooling liquid has advantages of excellent cooling, excellent lubricating, excellent rust resistance, excellent cleaning performance, long service life, easy recycling, no pollution or low pollution to the environment, and low foaming property without the addition of the defoaming agent while the dispersion effect is ensured, and eliminates adverse effects of the silicone oil component in the defoaming agent on the cooling liquid; and the preparation method of the cooling liquid is easy to operate, safe, reliable, low in comprehensive cost and suitable for large-scale production.

Description

technical field [0001] The invention belongs to the technical field of machining cooling liquid, and relates to a cooling liquid used in a cutting process, a preparation method and an application thereof. Background technique [0002] Diamond wire cutting crystalline silicon is a new silicon wafer processing technology developed in recent years. Compared with sand wire cutting, it has a significant cost advantage, mainly in terms of high cutting productivity, less environmental pollution, and less loss of silicon material in sawing seams. During the cutting process, the diamond consolidated on the busbar is used for cutting, and pure water is used as the cooling medium, and 1-3% cooling liquid is added to the pure water to cool the saw kerf, clean and disperse the cut silicon powder. [0003] In order to achieve a better dispersion effect, the coolant for diamond wire cutting generally has large foams, so it needs to be used with silicone oil or silicone oil-modified foam i...

AI Technical Summary

Problems solved by technology

[0003] In order to achieve a better dispersion effect, the coolant used for diamond wire cutting generally has large foams, so it needs to be used with silicone oil or silicone oil-modified foam inhibitors. However, silicone oil has a significant disadvantage: it is easy to agglomerate and contaminate the surface of the silicon wafer Dirty flakes are caused; sticky colloids are easily gathered in the waste water after cutting; the waste water recovery system and sewage treatment system are blocked, the filter membrane of the filter press or the filter holes of the ceramic membrane and related pipelines, etc.

The coolant has excellent cooling, lubricating, antirust and cleaning properties, is not easy to be corrupted and deteriorated, has a long service life, is easy to recycle and reuse, and has no or low pollution to the environment, but it still cannot be avoided. adverse effects

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