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Nano film material

A nano-film material, nano-film technology, applied in nanotechnology, nanotechnology, nanotechnology for materials and surface science, etc., can solve the problem of high cost and achieve the effect of low cost, good practical value and simple preparation process

Inactive Publication Date: 2020-06-09
余姚市晶鹏光伏发电有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Nanofilms of large-area non-layered materials can be epitaxially grown on single crystal substrates by molecular beam epitaxy, but the cost is high

Method used

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Examples

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Comparison scheme
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Embodiment Construction

[0013] The following description serves to disclose the present invention to enable those skilled in the art to carry out the present invention. The preferred embodiments described below are only examples, and those skilled in the art can devise other obvious variations.

[0014] The present invention will be further described below in conjunction with the examples, but the protection scope of the present invention is not limited only to the examples.

[0015] A kind of nano film material, comprises the following steps:

[0016] (1) The preparation of NiSe nano film: the Ni foil that selection thickness is 50 μ m, purity is 99.99% has 10sccmH in the low-pressure atmosphere of 20sccm Ar, 500 ℃ of annealing 30min, removes the oxide compound on Ni foil surface; After annealing finishes, ZnSe thin film was deposited on the surface of Ni foil by electron beam evaporation. During the whole deposition process, the vacuum degree was kept at 2×10-4Pa; then the ZnSe / Ni foil was anneale...

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Abstract

The invention discloses a nano film material. Steps of preparation of a NiSe nano film, transfer of the NiSe nano film, construction of a NiSe nano film optical detector and the like are included. TheNiSe nano film with the non-layered structure, which is grown by a solid-phase reaction method, is good in quality, large in grain size and small in grain boundary number; according to the photoelectric detector prepared on the basis of the high-quality NiSe nano film, the obtained photocurrent is increased by 4 orders of magnitudes compared with that of a NiSe nano crystalline film; the preparation process is simple, the cost is low, the practical value is good, and the method can be used for preparing other non-layered structure material nano films compatible with a traditional planar process.

Description

technical field [0001] The invention belongs to the field of semiconductor thin film materials and relates to a nano thin film material prepared by a solid phase reaction method. Background technique [0002] Graphene and other 2D materials, including hexagonal boron nitride and transition metal sulfides, have attracted extensive attention due to their unique structures and properties. In particular, high-quality, large-area two-dimensional films can be prepared on specific substrates by methods such as chemical vapor deposition, which significantly accelerates the application and development of two-dimensional materials. Inspired by layered two-dimensional materials, it can be predicted that nanofilms of non-layered materials are compatible with traditional planar processes, and are more conducive to their applications than other dimensions. Moreover, compared with films composed of nanocrystals, the prepared non-layered nanofilms with large-sized grains have superior prop...

Claims

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Application Information

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IPC IPC(8): H01L21/02H01L21/477H01L21/683H01L31/18H01L31/032B82Y30/00B82Y40/00
CPCB82Y30/00B82Y40/00H01L21/02425H01L21/0256H01L21/02631H01L21/477H01L21/6835H01L31/032H01L31/18H01L2221/68381Y02P70/50
Inventor 陈莉芳
Owner 余姚市晶鹏光伏发电有限公司
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