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Preparation method of silicon carbide coated diamond composite material, and diamond/aluminum composite material

A composite material and diamond technology, applied in the field of material preparation, can solve the problems of reducing thermal conductivity, high requirements, and large energy loss, etc., to avoid graphitization transformation, excellent thermal conductivity and moisture resistance, and good interface bonding performance Effect

Active Publication Date: 2020-10-02
HUNAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In order to achieve this purpose, silicon carbide-coated diamonds for thermal functions are usually prepared by mixing diamond particles and silicon powder at high temperatures (>1200°C). This high-temperature heat treatment method not only has high requirements for equipment, but also The loss of energy is also large
In addition, diamond tends to undergo graphitization transformation, which reduces its intrinsic thermal conductivity and limits the realization of high thermal conductivity of diamond composites.

Method used

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  • Preparation method of silicon carbide coated diamond composite material, and diamond/aluminum composite material
  • Preparation method of silicon carbide coated diamond composite material, and diamond/aluminum composite material
  • Preparation method of silicon carbide coated diamond composite material, and diamond/aluminum composite material

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0048] Place the diamond particles (particle size: 30-400 microns) ultrasonically treated with acetone, alcohol, and deionized water in the powder sample stage of the multi-functional magnetron sputtering equipment. During the deposition of the metal aluminum film, control The power and time of the magnetron sputtering aluminum film make the thickness of the metal aluminum film about 300 nm. Rotate the revolution table of the multifunctional magnetron sputtering equipment to make the powder sample table containing diamond particles from the aluminum target station to the silicon target station. The schematic diagram of the process is as follows figure 1 Shown. By controlling the time of the power of magnetron sputtering the silicon film, the thickness of the silicon film is about 400 nm. Then place the silicon-aluminum double-coated diamond particles in a tube furnace, and evacuate the tube furnace. When the vacuum degree in the tube furnace is better than 1Pa, turn on the heat...

Embodiment 2

[0050] Repeat Example 1, the only difference is that the temperature of the heat treatment is changed to 750°C.

[0051] XRD and Raman characterization of the heat-treated diamond particles, such as image 3 Shown. The results showed that the Si part of the outermost layer of the diamond surface was converted into SiC under the temperature treatment of 750℃.

Embodiment 3

[0053] Repeat Example 1, the only difference is that the temperature of the heat treatment is increased to 800°C-850°C.

[0054] XRD characterization of the heat-treated diamond particles, such as Figure 4 Shown. The results show that with the increase of heat treatment temperature, Si and Al in the outermost layer of diamond surface 4 C 3 Gradually decrease, the diffraction peak of SiC is obviously enhanced.

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Abstract

The invention relates to a preparation method of a silicon carbide coated diamond composite material and a diamond / aluminum composite material. A silicon carbide coating is synthesized on the surfaceof diamond through a chemical reaction under the condition of low0 temperature that is 1000 DEG C or below for the first time. The preparation method comprises the following steps: depositing a metalaluminum film on the surface of diamond by adopting a film deposition technology; continuously depositing a silicon film on the surface of the prepared sample to obtain double-plating diamond; carrying out vacuum heat treatment on the prepared double-plating diamond; and (4) cooling to room temperature to obtain the silicon carbide coated diamond composite material of which the surface is uniformly coated with the silicon carbide coating. The silicon carbide film layer of the synthesized silicon carbide coated diamond composite material is uniform and continuous, the surface of diamond is coated by the silicon carbide layer through chemical bonding, interface bonding performance with a diamond substrate is good, and the composite material can be used for development of high-thermal-conductivity and wear-resistant diamond composite materials.

Description

Technical field [0001] The invention relates to a method for preparing a silicon carbide coated diamond composite material and a diamond / aluminum composite material, belonging to the field of material preparation. Background technique [0002] The continuous development of electronic information technology has promoted the development of electronic packaging in the direction of high performance, high integration, light weight and miniaturization. The increasing packaging density and operating frequency have caused the heat generated by electronic components to become higher and higher. Therefore, there is an urgent need to develop a new generation of electronic package heat dissipation materials to ensure effective heat dissipation of electronic components. Diamond has excellent thermal physical properties, and its thermal conductivity can be as high as 2000 W·m -1 ·K -1 , The coefficient of thermal expansion is as low as 0.8×10 -6 K -1 , And has a lower density of 3.52g·cm -3 ,...

Claims

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Application Information

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IPC IPC(8): C01B32/28C01B32/984C23C14/35C23C14/18
CPCC01B32/28C01B32/984C23C14/35C23C14/185C01P2002/72C01P2002/82C01P2006/32
Inventor 杨武霖李想军周灵平朱家俊符立才李德意
Owner HUNAN UNIV
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