Preparation method of silicon carbide coated diamond composite material, and diamond/aluminum composite material
A composite material and diamond technology, applied in the field of material preparation, can solve the problems of reducing thermal conductivity, high requirements, and large energy loss, etc., to avoid graphitization transformation, excellent thermal conductivity and moisture resistance, and good interface bonding performance Effect
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Embodiment 1
[0048] Place the diamond particles (particle size: 30-400 microns) ultrasonically treated with acetone, alcohol, and deionized water in the powder sample stage of the multi-functional magnetron sputtering equipment. During the deposition of the metal aluminum film, control The power and time of the magnetron sputtering aluminum film make the thickness of the metal aluminum film about 300 nm. Rotate the revolution table of the multifunctional magnetron sputtering equipment to make the powder sample table containing diamond particles from the aluminum target station to the silicon target station. The schematic diagram of the process is as follows figure 1 Shown. By controlling the time of the power of magnetron sputtering the silicon film, the thickness of the silicon film is about 400 nm. Then place the silicon-aluminum double-coated diamond particles in a tube furnace, and evacuate the tube furnace. When the vacuum degree in the tube furnace is better than 1Pa, turn on the heat...
Embodiment 2
[0050] Repeat Example 1, the only difference is that the temperature of the heat treatment is changed to 750°C.
[0051] XRD and Raman characterization of the heat-treated diamond particles, such as image 3 Shown. The results showed that the Si part of the outermost layer of the diamond surface was converted into SiC under the temperature treatment of 750℃.
Embodiment 3
[0053] Repeat Example 1, the only difference is that the temperature of the heat treatment is increased to 800°C-850°C.
[0054] XRD characterization of the heat-treated diamond particles, such as Figure 4 Shown. The results show that with the increase of heat treatment temperature, Si and Al in the outermost layer of diamond surface 4 C 3 Gradually decrease, the diffraction peak of SiC is obviously enhanced.
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