Method for measuring four-dimensional electron energy loss spectrum of to-be-measured sample

Abstract

The invention provides a method for measuring a four-dimensional electron energy loss spectrum of a to-be-measured sample. The method comprises the following steps: S1, putting the prepared to-be-measured sample into an electron microscope, and rotating the to-be-measured sample to a to-be-measured band shaft; S2, correcting astigmatism when a convergence half angle of an electron beam of the electron microscope is a first convergence half angle, and then switching the convergence half angle of the electron beam to a second convergence half angle; S3, adjusting a diffraction spot on an electron microscope camera to enable a momentum area to be measured to be located in a reserved area of a slit diaphragm; S4, inserting the slit diaphragm to enable the slit diaphragm to be located in the reserved area; S5, inserting a monochromator, limiting the energy passing through the electron beam, and improving an energy resolution; S6, adjusting the astigmatism; and S7, obtaining an energy-momentum diagram of the current position of the to-be-measured sample. The method can be used for measuring the energy-momentum spectrum of a nanostructure, does not need a large single crystal sample, and is an effective supplement for an angle resolution photoelectron spectroscopy and a high resolution electron energy loss spectrometer.

Description

technical field [0001] The invention realizes the measurement of the four-dimensional electron energy loss spectrum (two-dimensional space + energy + momentum) by using the novel slit aperture, can characterize the electrical and magnetic properties of materials, and is applied to physics research. Background technique [0002] In recent years, with the development of electron microscopy, ordinary imaging methods such as annular dark field images and central bright field images have become more and more limited because they can only obtain intensity information. Scientists have proposed a variety of methods to obtain more dimensional information, such as stacked diffraction imaging technology: the incident beam is scanned on the sample, and the two-dimensional diffraction intensity pattern is recorded at each scanning position, thereby constructing a four-dimensional diffraction Data; Ultrafast Transmission Electron Microscopy: This technology combines the spatial resolution...

AI Technical Summary

Problems solved by technology

[0003] However, none of these techniques combine momentum and energy, and electron energy loss spectroscopy includes rich information about the inelastic scattering of electron-atom interactions, which can deeply analyze various physical and chemical properties of substances

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