Method for producing single crystal ingot and method for producing single crystal wafer
A manufacturing method and single crystal ingot technology, applied in the direction of single crystal growth, single crystal growth, chemical instruments and methods, etc., can solve the problems that cannot be applied
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[0090] Hereinafter, although an Example and a comparative example are given and this invention is demonstrated more concretely, this invention is not limited to these Examples.
[0091] (Example)
[0092] A first lithium tantalate (LT) single crystal ingot with a crystal orientation of 38° RY, a straight body length of about 90 mm, and a diameter of 4 inches was grown by the pulling method (CZ method). Specifically, the raw material of LT was filled in a crucible made of iridium, and after the raw material was melted by high-frequency heating, the tip of the seed crystal prepared in advance with a crystal orientation of 38° RY was brought into contact with the molten liquid, and slowly pulled up. get this figure 1 An LT single crystal ingot having the shape shown as an example. It should be noted that pulling is carried out in a mixed gas of nitrogen and oxygen at a pulling speed of 1 to 5 mm / hour and a rotation speed of 5 to 20 rpm.
[0093] Next, from the obtained LT sing...
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