Easily integrated micro atomic layer thermopile heat flow sensor and preparation method thereof

Abstract

The invention belongs to the technical field of heat flow sensors, and particularly relates to an easily integrated micro atomic layer thermopile heat flow sensor and a preparation method thereof. On the basis of the transverse thermoelectric effect, n thermopile lines are connected in series and conducted through n-1 conductive films; and the cost is reduced by using a single material. The sensor can be manufactured through the MEMS technology and has the advantages of being small in size, light in weight, high in response speed and the like; meanwhile, the adopted thermopile is simple in structure, the preparation process is simple, controllability is high, the sensor has good compatibility with an existing mature semiconductor technology, and is suitable for industrial large-scale production. On the premise of ensuring the response speed, the line number can be designed according to the actual measurement requirement to multiply the response signal, so that the sensitivity of the sensor is greatly improved, different measurement requirements are met, and the application range of the sensor is further expanded; and when the design of additional m electrode conductive films is adopted, signal receivers with different measuring ranges can be compatible.

Description

technical field [0001] The invention belongs to the technical field of heat flow sensors, in particular to an easily integrated miniature atomic layer thermopile heat flow sensor and a preparation method thereof. Background technique [0002] In the field of heat flow sensor technology, by measuring the temperature gradient of the object, the heat flow parameters through the object can be determined. A typical device type is the thin-film thermopile sensor, which exploits the principle of the conventional longitudinal thermoelectric effect and requires at least two materials with significantly different Seebeck coefficients. This will greatly increase the cost of thin-film thermopile sensors, hindering their widespread application to some extent. [0003] The atomic layer thermopile heat flow sensor (ALTP) is a new type of high-speed sensor for transient heat flow measurement based on the transverse Seebeck effect. Its working principle is that when there is a temperature ...

AI Technical Summary

Problems solved by technology

But so far there is no large-scale commercial application, mainly because the cost of such devices is high, the output signal is weak, and the demand for miniaturization based on the current technological development that can be integrated (process compatible) also urgently needs to be solved.

However, the current research focus at home and abroad is mainly aimed at the optimization of the thermoelectric material characteristics of the ALTP heat flow sensor itself, ignoring the optimization design based on the sensor structure and miniaturization.

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