Two-dimensional material heterojunction photoelectric detector with surface plasmon and preparation method thereof
A technology of surface plasmons and photodetectors, applied in the field of optical communications, can solve the problems of low light absorption rate, and achieve the effects of simple preparation, improved light response, and enhanced absorption
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[0015] figure 1 is a structural diagram of a tungsten diselenide / molybdenum disulfide heterojunction photodetector with surface plasmons. The devices are inorganic glass, ITO electrode, molybdenum disulfide, tungsten diselenide, photoresist and gold nanoparticles from bottom to top. exist figure 1 In the structure shown in the figure, the patterned ITO electrode and heterojunction are prepared by depositing an ITO film on the inorganic glass, throwing a layer of positive photoresist, and then using laser direct writing lithography technology to write on the photoresist. The pattern opposite to the electrode pattern is photoetched on the top, and then the ITO covered with the photoresist is put into the etching solution for wet etching, and finally the patterned ITO electrode is obtained by removing the glue. The two-dimensional layered tungsten diselenide and molybdenum disulfide materials were prepared by exfoliating the bulk materials by mechanical exfoliation, and then tr...
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