The invention discloses a non-transfer
rare earth doped
tungsten diselenide heterojunction photoelectric device and a preparation method thereof, and belongs to the technical field of
semiconductor photoelectric devices. The method comprises the following steps: carrying out cleaning and
hydrofluoric acid activation treatment on a
silicon substrate on a
silicon-based insulator; the preparation method comprises the following steps: taking
tungsten trioxide,
erbium chloride,
sodium chloride and
selenium as precursors through a one-step
chemical vapor deposition method, growing a
single crystal erbium-doped
tungsten diselenide film on an activated substrate
silicon surface in an in-situ epitaxial growth manner, and directly constructing an
erbium-doped
tungsten diselenide / silicon Van der Waals
heterojunction; and finally, preparing the
electrode through photoetching, developing,
metal deposition and stripping processes. According to the method, interface
pollution caused by a traditional transfer process is thoroughly avoided, and high-concentration uniform
erbium doping is realized by using a
sodium chloride fluxing agent. The prepared
heterojunction device has an atomic-scale clean interface and shows excellent photoelectric performance, the process is compatible with a complementary
metal oxide semiconductor process, and a reliable platform is provided for high-performance silicon-based photoelectric integration.