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A flexible integrated array pressure sensor and preparation method thereof

A pressure sensor, integrated technology, applied in the field of flexible sensors, to achieve the effects of increased sensitivity, increased resistance, and a wide range of applications

Active Publication Date: 2022-07-19
NORTHWESTERN POLYTECHNICAL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to solve the existing deficiencies, and provide a flexible integrated array pressure sensor and its preparation method

Method used

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  • A flexible integrated array pressure sensor and preparation method thereof
  • A flexible integrated array pressure sensor and preparation method thereof
  • A flexible integrated array pressure sensor and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0052] A preparation method of a flexible integrated array pressure sensor, the flow chart of the design method is shown in figure 2 , the specific steps are:

[0053] 1) Fabrication of flexible arrayed electrodes

[0054] 1.1) A flexible arrayed electrode pair is prepared by laser direct writing on a flexible substrate, including a flexible arrayed upper electrode and a flexible arrayed lower electrode. After etching, a miniature copper electrode that can be transferred twice is obtained. The material of the flexible substrate is poly Dimethyl siloxane, this process results in a flexible structure processed in one pass;

[0055] 1.2) Use absolute ethanol to clean the surface of the flexible arrayed electrode, and transfer the flexible arrayed lower electrode to the surface of the polydimethylsiloxane film for a second time.

[0056] 2) Preparation of flexible array integrated pressure sensing module

[0057] 2.1) Prepare patterned copper foil mask by laser direct writing ...

Embodiment 2

[0066] A preparation method of a flexible integrated array pressure sensor, the specific steps are:

[0067] 1) Fabrication of flexible arrayed electrodes

[0068] 1.1) A flexible arrayed electrode pair is prepared on a flexible substrate by a laser direct writing method, including a flexible arrayed upper electrode and a flexible arrayed lower electrode. After etching, a micro silver foil electrode that can be transferred twice is obtained. The material of the flexible substrate is Acrylic, this process results in a flexible structure processed in one go;

[0069] 1.2) Use absolute ethanol to clean the surface of the flexible arrayed electrode, and transfer the lower electrode of the flexible array to the surface of polydimethylsiloxane twice.

[0070] 2) Preparation of flexible array integrated pressure sensing module

[0071] 2.1) Spin-coat the conductive carbon oil to form a thin film and cure it at room temperature, pattern the thin film by laser direct writing, and the...

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Abstract

The invention provides a flexible integrated array pressure sensor and a preparation method. The flexible integrated array pressure sensor includes an external packaging layer, a flexible substrate layer, and m*n array-distributed flexible pressure sensing sensors arranged on the flexible substrate layer. Sensing unit, m and n are both positive integers; each flexible pressure-sensitive sensing unit includes a pressure-sensitive conductive film, and an upper electrode and a lower electrode that are respectively bonded to the upper surface and the lower surface of the pressure-sensitive conductive film and are alternately arranged; Among them, the upper electrode and the lower electrode constitute an electrode pair, and the lower electrode is adhered to the flexible substrate layer; the arrayed pressure-sensitive conductive films together constitute the pressure-sensitive layer. When the pressure-sensitive layer is subjected to pressure, its vertical direction along the electrode plane is The direction produces strain; each electrode pair is connected to the electrode lead wire to complete the output of the sensor signal. The preparation method is simple, and only simple processes such as solution method, laser direct writing, template method and the like are used for processing, and the array integration of rapid large-area pressure cells can be realized.

Description

technical field [0001] The invention belongs to the technical field of flexible sensors, and in particular relates to a flexible integrated array pressure sensor and a preparation method. Background technique [0002] Since the 1980s, flexible mechanical sensors have been the most active development direction in the field of flexible sensing electronics. Especially in the past 20 years, flexible pressure sensors have been widely studied, and have achieved good results in sensitive materials, manufacturing technology, and multi-functional integration. Great progress, usually as wearable electronic devices for human body movement and physiological state monitoring, such as pulse, respiration, heart rate, etc. [0003] Due to the larger coverage area, the flexible pressure sensor array can monitor the pressure changes at multiple points at the same time, and can reflect more systematic, holistic and other data information, so its application range is often wider than a single p...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L1/22
CPCG01L1/2293
Inventor 王学文杨亚宝李玥魏渊
Owner NORTHWESTERN POLYTECHNICAL UNIV
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