Production device suitable for electronic-grade ammonia gas and ammonia water and production method thereof

Abstract

The invention discloses a production device suitable for electronic-grade ammonia gas and ammonia water and a production method thereof, and relates to the technical field of chemical engineering, the production device comprises an evaporator, a gas-liquid separator, an adsorption device, a first rectification device, a second rectification device, a first washing device, a second washing device, an absorption device and a filtering device which are communicated in sequence; wherein a thermal coupling device is arranged between the first rectification device and the second rectification device, the second rectification device is provided with a tower top gas outlet, a first inlet and a second inlet, the thermal coupling device is provided with a liquid ammonia inlet, a hot gas inlet, a hot gas outlet and a liquid ammonia outlet, the liquid ammonia outlet is communicated with the first inlet, and the first rectification device is communicated with the second inlet. The tower top gas outlet is respectively communicated with the hot gas inlet, the first washing device and an ammonia gas storage device. The production device can be suitable for production of electronic-grade ammonia gas and electronic-grade ammonia water at the same time, the energy consumption utilization rate is increased, and then the production cost is reduced.

Description

technical field [0001] The invention relates to the technical field of chemical industry, in particular to a production device suitable for electronic grade ammonia and ammonia water and a production method thereof. Background technique [0002] With the development of the semiconductor industry, the requirements for trace metal impurity content, particle size and quantity, and anion impurity content of wet electronic chemicals are becoming more and more stringent, and the market is increasingly demanding more ultra-pure electronic grade chemicals and gases . At present, electronic-grade ammonia gas and electronic-grade ammonia water are the main ultra-pure chemical materials commonly used in the semiconductor industry, and play an important role in the manufacturing industries such as integrated circuits and LCDs. Among them, electronic-grade ammonia gas is mainly used for chip cleaning, etching, doping Miscellaneous and precipitation process, electronic-grade ammonia wate...

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Problems solved by technology

[0004] Aiming at the technical problem that the production method of electronic grade ammonia gas or electronic grade ammonia water in the prior art cannot satisfy the technical problem of being applicable to the production of electronic grade ammonia gas and electronic grade ammonia water at the same time, the present invention provides a kind of production method suitable for electronic grade ammonia gas and ammonia water. The production device and production method thereof are not only applicable to the production of electronic grade ammonia gas and electronic grade ammonia water, but also have high energy utilization rate and low production cost

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