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Scanning electrochemical microscope probe and preparation method thereof

A scanning electrochemistry and microscopy technology, applied in the field of electrochemistry, can solve the problem of not being able to explain the physiological characteristics of a single cell, and achieve the effect of high detection performance and microscopic imaging resolution.

Pending Publication Date: 2022-01-04
FUDAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Traditional cell research takes a large number of cell populations as the research object. However, during the research process, researchers found that there are still certain differences between individual cells. The average value of cell population analysis data cannot explain the physiological characteristics of individual cells.

Method used

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  • Scanning electrochemical microscope probe and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0025] Example 1: Al 2 o 3 / Pt Microtubule Probe Preparation and Cholesterol Detection

[0026] Prepare a uniform layer of photoresist (ARP3510) on the silicon wafer substrate by spin coating as an organic sacrificial layer. 30 nm Al was then deposited on it using electron beam evaporation 2 o 3 Insulation. A 30 nm Pt metal layer was prepared on it by magnetron sputtering. Finally, the photoresist sacrificial layer was removed with acetone to release the Al 2 o 3 / Pt double layer film. Subject to Al 2 o 3 / Pt double-layer film under the effect of internal strain gradient, the double-layer film coils to form a microtubular probe. The probe diameter is 1 μm, and its outer surface is Al 2 o 3 The insulating layer, the inner surface is a Pt metal layer. The Pt layer was modified with cholesterol oxidase, and the Pt metal layer was connected with a copper wire for scanning electrochemical microscopy. The front end of the microtubule probe is contacted with different p...

Embodiment 2

[0027] Example 2: HfO 2 Preparation of / Au Microtubule Probe and Detection of Dissolved Oxygen

[0028] Put polymethyl methacrylate (PMMA) pellets in acetone and heat to 80 o C Wait until the PMMA is completely dissolved and prepare a solution of PMMA in acetone (concentration: ~10%). Using this solution, a PMMA thin film was prepared on a glass substrate as an organic sacrificial layer by spin coating. 40 nm HfO was then deposited on it using atomic layer deposition 2 Insulation. On it, a 30 nm Au metal layer was prepared by electron beam evaporation. Finally, remove the sacrificial layer of PMMA glue with acetone to release HfO 2 / Au bilayer film. affected by HfO 2 / Au bilayer film under the effect of internal strain gradient, the bilayer film curls to form a microtubular probe. The probe has a diameter of 200 nm and its outer surface is HfO 2 The insulating layer, the inner surface is an Au metal layer. Connect the Au metal layer with copper wires for scanning ele...

Embodiment 3

[0029] Example 3: SiO 2 Preparation of / Pt Microtubule Probe and Study on the Effect of Ultraviolet Light on Cell Physiological Activities

[0030] Prepare a uniform layer of photoresist (AZ5214) on the silicon wafer substrate by spin coating as an organic sacrificial layer. Then 20 nm SiO was deposited on it by magnetron sputtering 2 Insulation. On it, a 20 nm Pt metal layer was prepared by electron beam evaporation. Finally, the photoresist sacrificial layer is removed with acetone to release the SiO 2 / Pt double layer film. affected by SiO 2 / Pt double-layer film under the effect of internal strain gradient, the double-layer film coils to form a microtubular probe. Probe diameter is 1 μm, its outer surface is SiO 2 The insulating layer, the inner surface is a Pt metal layer. Connect the Pt metal layer with copper wires for scanning electrochemical microscopy. Inject PBS buffer into the microtube and contact the tip of the microtube probe with the surface of cells (...

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Abstract

The invention belongs to the technical field of electrochemistry, and particularly relates to a scanning electrochemical microscope probe and a preparation method thereof. The preparation method comprises the following steps: preparing a sacrificial layer of a probe in the form of a nano film; preparing the insulating layer of the probe on the sacrificial layer in the form of a nano-film, wherein the thickness of the insulating layer is controlled to be 5-50 nm; preparing a metal electrode layer on the insulating layer in the form of a nano film, wherein the thickness of the metal electrode layer is controlled to be 5-50 nm; removing the sacrificial layer by using an organic solvent to release the double-layer film of the insulating layer and the metal layer; and enabling the internal strain gradient of the double-layer film to promote the insulating layer and the metal electrode layer to be curled to form a microtube structure in which the metal electrode layer is wrapped by the insulating layer. According to the invention, the structure can be used as a scanning electrochemical microscope probe; and through material and structure adjustment, higher detection performance and microscopic imaging resolution are realized.

Description

technical field [0001] The invention belongs to the technical field of electrochemistry, and in particular relates to a scanning electrochemical microscope probe and a preparation method thereof. Background technique [0002] Cells are the basic structural and functional units of living organisms. Exploring the structure and composition of cells is of great significance for exploring the physiological mechanism and life activity rules of organisms. Traditional cell research takes a large number of cell populations as the research object. However, during the research process, researchers found that there are still certain differences between individual cells. The average value of cell population analysis data cannot explain the physiological characteristics of individual cells. . Carrying out research at the single-cell level can comprehensively and accurately grasp the physiological state and physiological activities of cells, which is conducive to early diagnosis of disea...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01Q70/16G01Q70/08G01Q60/60G01N15/10
CPCG01Q70/16G01Q70/08G01Q60/60G01N15/1031G01N2015/1006
Inventor 潘晓霞屈泽华高瑞华胡晓月
Owner FUDAN UNIV