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Method and device for preparing hydrogen fluoride from BOE waste liquid

A hydrogen fluoride, waste liquid technology, applied in the directions of hydrogen fluoride, fluorine/hydrogen fluoride, chemical instruments and methods, etc., to achieve the effects of improving efficiency, reasonable process design and convenient operation

Pending Publication Date: 2022-01-21
浙江容跃环保科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0009] The invention proposes a method and device for preparing hydrogen fluoride from BOE waste liquid, which solves the problem of post-treatment of BOE waste liquid in the prior art

Method used

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  • Method and device for preparing hydrogen fluoride from BOE waste liquid
  • Method and device for preparing hydrogen fluoride from BOE waste liquid
  • Method and device for preparing hydrogen fluoride from BOE waste liquid

Examples

Experimental program
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Effect test

Embodiment 1

[0049] After completely reacting 998.6g of BOE waste liquid with 305.5g of potassium hydroxide solution, it was introduced into the electrodialysis experimental equipment, and the recorded data were as follows:

[0050]

[0051]According to the calculation of the experimental data, it can be seen that the efficiency of electrodialysis separation of hydrofluoric acid in this experiment is 96.4%.

Embodiment 2

[0053] Put 1000kg of BOE waste liquid and 306kg of potassium hydroxide solution into the potassium fluoride reactor for reaction. After the reaction is complete, the reaction solution is introduced into the ammonia distillation kettle, and the ammonia gas is stripped. Lead the remaining reaction solution into the electrodialysis (EDI) membrane group, and decompose it into dilute hydrofluoric acid solution and dilute potassium hydroxide solution; among them, the electrode solution for bipolar membrane electrodialysis is potassium hydroxide, with a concentration of 1.0mol / L ;The current density is 800A / M 2 . Output when the concentration of dilute hydrofluoric acid is 10%. After the reaction solution is decomposed by electrodialysis, when the potassium fluoride concentration is reduced to 5%, it is output from the electrodialysis membrane group, concentrated to 10-25wt%, and then returned to the electrodialysis membrane group. The dilute potassium hydroxide solution is introdu...

Embodiment 3

[0058] Put 1000kg of BOE waste liquid and 306kg of potassium hydroxide solution into the potassium fluoride reactor for reaction. After the reaction is complete, the reaction solution is introduced into the ammonia distillation kettle, and the ammonia gas is stripped. Lead the remaining reaction solution into the electrodialysis (EDI) membrane group, and decompose it into dilute hydrofluoric acid solution and dilute potassium hydroxide solution; among them, the electrode solution of bipolar membrane electrodialysis is potassium hydroxide with a concentration of 0.5mol / L ;The current density is 700A / M 2 . Output when the concentration of dilute hydrofluoric acid is 17%. After the reaction solution is decomposed by electrodialysis, when the potassium fluoride concentration is reduced to 5%, it is output from the electrodialysis membrane group, concentrated to 10-25wt%, and then returned to the electrodialysis membrane group. The dilute potassium hydroxide solution is introduce...

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Abstract

The invention provides a method and a device for preparing hydrogen fluoride from BOE waste liquid, and the method comprises the following steps: reacting the BOE waste liquid with alkali to generate a fluoride salt solution and ammonia water; carrying out steam stripping to evaporate out ammonia gas; decomposing the fluoride salt solution into hydrofluoric acid dilute liquor and dilute alkali liquor through bipolar membrane electrodialysis; heating and concentrating the dilute alkali liquor into concentrated alkali liquor and wastewater, and recycling the concentrated alkali liquor; heating, distilling and concentrating the hydrofluoric acid dilute liquor into concentrated hydrofluoric acid and wastewater; mixing the concentrated hydrofluoric acid with concentrated sulfuric acid to obtain hydrogen fluoride gas and dilute sulfuric acid; heating and concentrating the dilute sulfuric acid into concentrated sulfuric acid and wastewater, and recycling the concentrated sulfuric acid. According to the method, the chip etching BOE waste liquid is used as the raw material, the hydrogen fluoride product is obtained after a series of treatment, alkali liquor and concentrated sulfuric acid are recycled in the process, a closed loop is achieved in the whole reaction process, value orientation of turning waste into wealth, circular economy and environmental protection is truly achieved, and the method is suitable for industrial application and popularization.

Description

technical field [0001] The invention relates to the field of waste liquid reuse, in particular to a method and device for preparing hydrogen fluoride from BOE waste liquid. Background technique [0002] BOE (Buffered Oxide Etch), Buffered Oxide Etch, referred to as "Buffered Oxide Etch". It is made by mixing hydrofluoric acid (HF) and ammonium fluoride (NH4F) in different proportions. Used in the etching of semiconductor components (such as chips), HF mainly plays the role of etching reaction, NH 4 F is used as a buffer; HF reacts with silicon, NH 4 F fixes the concentration of H+ to maintain a certain etching rate. [0003] The ratio of BOE in each factory is not exactly the same. 6:1 BOE buffer etching solution means 49% HF aqueous solution and 40% NH 4 F aqueous solution is mixed according to the volume ratio of 1:6, HF and NH 4 After F mixing, ammonium bifluoride (NH 4 HF 2 ). Under normal circumstances, the etching speed of semiconductor elements is about 10nm / ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B7/19C01C1/02
CPCC01B7/191C01B7/195C01C1/026
Inventor 周贞锋应悦应盛荣姜战闻涛
Owner 浙江容跃环保科技有限公司
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