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Optical element comprising anti-reflection protective film and preparation method of optical element

A technology of optical components and diamond-like film, applied in the field of optical components, can solve the problems of high resistance to mechanical damage, high transmittance, etc., and achieve the effect of low cost and simple process

Active Publication Date: 2022-02-08
GRINM GUOJINGHUI NEW MATERIALS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the existing ZnSe coated with an anti-reflective protective film cannot balance high transmittance and high mechanical damage resistance.

Method used

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  • Optical element comprising anti-reflection protective film and preparation method of optical element
  • Optical element comprising anti-reflection protective film and preparation method of optical element
  • Optical element comprising anti-reflection protective film and preparation method of optical element

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0050] Embodiment 1: prepare as figure 1 optics shown

[0051] Step 1: Perform polishing pretreatment on the ZnSe substrate 100. The specific operation is: 1. Polish the ZnSe substrate of Φ125×3, requiring surface finish level II, ΔN=0.3; 2. After polishing, coat the ZnSe substrate with Apply protective paint. Wash off the protective paint before coating. The specific steps include: soaking in analytical grade alcohol for 2 hours, and then scrubbing with a mixture of alcohol and ether.

[0052] Step 2: Put in the substrate. The specific operations are: turn on the circulating water, air compressor and main power supply; turn on the diffusion pump to preheat, open the air valve to inflate the vacuum chamber; open the door of the vacuum chamber, clean the vacuum chamber, and focus on cleaning the ion source and Electron gun; add film material, replace the crystal oscillator; put the ZnSe substrate into the jig, and then put it on the planetary disc of the coating machine; chec...

Embodiment 2

[0059] Embodiment 2: preparation such as figure 2 optics shown

[0060] The lower surface of the ZnSe substrate in the optical element made in Example 1 is according to G / L 1 / H / L 2 In the order of / M / A, the anti-reflection coating is plated by ion-assisted electron evaporation method, where G represents the ZnSe substrate, L 1 represents the first ytterbium fluoride layer, H represents the zinc selenide layer, L 2 Represents the second ytterbium fluoride layer, M represents the zinc sulfide layer, A represents air, and the physical thicknesses of the layers from the substrate to the air are: 200nm (first ytterbium fluoride layer), 500nm (zinc selenide layer), 1030nm (second ytterbium fluoride layer), 200nm (zinc sulfide layer). In the process of preparing zinc selenide layer, the deposition rate of ZnSe film material is 0.4nm / s; in the process of preparing zinc sulfide layer, the deposition rate of ZnS film material is 0.4nm / s; layer and a second YbF layer, YbF 3 The d...

Embodiment 3

[0062] The optical element prepared in Example 2 is tested for transmittance in the 8-12 micron wave band, and the results show that the average transmittance in the 8-12 micron wave band is greater than 90%, and the transmittance curve is shown in image 3 shown.

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Abstract

The present invention relates to an optical element comprising: a substrate; n layers of zinc sulfide films and the n layers of germanium films which are alternately and vertically stacked on the upper surface of the substrate, wherein the zinc sulfide film is close to the substrate, the zinc sulfide film close to the substrate is a first layer of zinc sulfide film, and the germanium film close to the substrate is a first layer of germanium film, which are successively named; and a diamond-like carbon film stacked on the nth layer of germanium film, wherein the substrate is ZnSe, and n is a positive integer greater than 2. The optical element provided by the invention has relatively high transmittance and relatively high mechanical damage resistance. The invention also relates to a preparation method of the optical element. The preparation method is simple in process, free of pollution and low in cost.

Description

technical field [0001] The invention relates to the technical field of optical elements, in particular to an optical element including an anti-reflection protective film and a preparation method thereof. Background technique [0002] In the field of infrared optical coatings, infrared optical materials are mainly used as lenses, windows and hoods of photoelectric detection systems, and are optical components in direct contact with the external environment in photoelectric detection systems. With the upgrading and development of military equipment, the application range of infrared optical components is becoming more and more extensive. Due to long-term work in harsh environments such as high speed, wind and sand, salt spray or sea water, the requirements for the ability of infrared optical components to withstand harsh environments are increasing. high. For example, windows or hoods in airborne, high-speed missiles, and shipborne infrared imaging systems are required to be ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B1/115G02B1/14C23C14/06C23C14/18C23C14/32C23C16/26C23C28/00
CPCG02B1/115G02B1/14C23C14/32C23C14/0629C23C14/18C23C16/26C23C28/322C23C28/343
Inventor 李欢欢路淑娟曹波许宁王伦张云博贾孟
Owner GRINM GUOJINGHUI NEW MATERIALS CO LTD