Separation and purification process and device for preparing high-purity acyl fluoride compound

Abstract

The invention relates to a separation and purification process and device for preparing a high-purity acyl fluoride compound, and the process comprises the following steps: condensing and separating a reaction product obtained by preparing hexafluoropropylene oxide through a molecular oxygen liquid phase oxidation method, pressurizing a low-boiling-point component, and inputting the pressurized low-boiling-point component into a rectification device for two-stage rectification, high-purity carbonyl fluoride can be obtained through membrane separation after first-stage rectification, and high-purity trifluoroacetyl fluoride can be obtained through membrane separation after second-stage rectification; the condensed and separated high-boiling-point components are subjected to membrane separation and then are sequentially input into an extractive distillation tower and a solvent recovery tower, and high-purity hexafluoropropylene oxide and raw material gas hexafluoropropylene can be obtained. Compared with an existing traditional direct washing separation process, on one hand, a large amount of waste liquid is prevented from being generated; on the other hand, high-purity formyl fluoride and trifluoroacetyl fluoride by-products can be obtained for resource utilization. The method has the advantages of simple process route and low energy consumption, and is suitable for intermittent or continuous production process under a system for preparing hexafluoropropylene oxide by a molecular oxygen liquid phase oxidation method.

Description

technical field [0001] The invention belongs to the technical field of fluorine-containing fine chemicals, and in particular relates to a separation and purification process and device for preparing high-purity acid fluoride compounds. Background technique [0002] Acyl fluoride compounds are widely used in cleaning agents, etching agents, pesticide intermediates, fluorine-containing material monomers, etc. in the electronics industry, and are an important class of fluorine-containing compounds. For example, formyl fluoride (COF 2 , CAS: 353-50-4) is an irritating, non-flammable, colorless, toxic gas at room temperature. COF 2 As an electronic special gas, it can be used as etching gas and cleaning gas in semiconductor manufacturing. Its GWP value is about 1, ODP value is zero, and its atmospheric life is very low (<1a). It is an environmentally friendly electronic gas. Can replace traditional PFC, NH 3 . Another COF 2 It can also be used as a raw material for organ...

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Problems solved by technology

Dongyue Company reported in the patent CN110845448B that the by-products of acyl fluorides are converted into stable neutral esters by alcohol washing. Although they can be reused, high-purity acyl fluorides cannot be directly obtained

Daikin Industry Co., Ltd. proposed a method for manufacturing formyl fluoride and hexafluoropropylene oxide in patent CN102822155B, but this method did not clearly propose a specific separation process device and could not realize industrialization; Dongyue Company reported in patent CN111646916A , the trifluoroacetyl fluoride can only be purified to 98wt% by a simple rectification process, but the purity still cannot meet the requirements of electronic special gas

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