Carbon/carbon composite material crucible containing aluminum oxide coating and silicon carbide coating

A technology of carbon composite materials and silicon carbide coatings, which is applied in the growth of polycrystalline materials, chemical instruments and methods, and crystal growth, can solve the problems of reducing the service life of crucibles, shortening the service life of crucibles, and complicated processes, and achieves guaranteed Effects of bonding strength, improving service life, and improving hoop tensile strength

Active Publication Date: 2022-05-10
XIAN CHAOMA SCI TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] Patent CN 113200765 A discloses a method of preparing and forming a layer of Si on the surface of a carbon ceramic crucible by CVD. 3 N 4 Composite coating with BN to improve the high temperature stability and silicon corrosion resistance of the crucible, but Si 3 N 4 The coating has a certain wettability to silicon, and the high density of the carbon ceramic crucible will lead to increased cost and poor thermal shock resistance, shortening the service life of the crucible; patent CN113149686 A discloses a carbon / carbon composite with a composite ceramic layer A material crucible and a preparation method thereof, the carbon / carbon composite material crucible is composed of a carbon / carbon composite material crucible matrix and a composite ceramic layer attached to the inner surface of the carbon / carbon composite material crucible matrix, thereby effectively inhibiting the impact of silicon vapor on the carbon / carbon composite material crucible The erosion of the carbon composite material crucible matrix, but this preparation method needs to prepare the composite ceramic layer green body first, and then bond it with a binder. risk, reducing the service life of the crucible

Method used

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  • Carbon/carbon composite material crucible containing aluminum oxide coating and silicon carbide coating
  • Carbon/carbon composite material crucible containing aluminum oxide coating and silicon carbide coating
  • Carbon/carbon composite material crucible containing aluminum oxide coating and silicon carbide coating

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Effect test

Embodiment 1

[0031] The preparation steps of a carbon / carbon composite material crucible containing alumina coating and silicon carbide coating are as follows:

[0032] (1) The bulk density is 0.30g / cm3 prepared in the form of axial carbon fiber non-weft cloth / carbon mesh tire composite layup and circumferential carbon fiber continuous winding layer alternately stacked and needled 3 carbon fiber prefabricated body;

[0033] Among them, the carbon fiber non-weft cloth / carbon mesh tire composite layer contains a layer of carbon fiber non-weft cloth and a layer of carbon mesh tire, and the carbon fiber non-weft cloth / carbon mesh tire composite layer and a layer of carbon fiber continuous winding layer Alternate superposition;

[0034] (2) First, the carbon fiber preform is subjected to pyrolytic carbon densification treatment by chemical vapor infiltration process and densified to 1.0g / cm 3, and then use the resin impregnation carbonization treatment process to continue to densify and densi...

Embodiment 2

[0043] The preparation steps of a carbon / carbon composite material crucible containing alumina coating and silicon carbide coating are as follows:

[0044] (1) The bulk density is 0.60g / cm3 prepared in the form of axial carbon fiber non-weft cloth / carbon mesh tire composite layup and circumferential carbon fiber continuous winding layer alternately stacked and needle punched 3 carbon fiber prefabricated body;

[0045] Among them, the carbon fiber non-weft cloth / carbon mesh tire composite layer contains a layer of carbon fiber non-weft cloth and a layer of carbon mesh tire, and the carbon fiber non-weft cloth / carbon mesh tire composite layer and a layer of carbon fiber continuous winding layer Alternate superposition;

[0046] (2) First, the carbon fiber preform is subjected to pyrolytic carbon densification treatment by chemical vapor infiltration process and densified to 1.2g / cm 3 , and then use the resin impregnation carbonization treatment process to continue to densify a...

Embodiment 3

[0055] The preparation steps of a carbon / carbon composite material crucible containing alumina coating and silicon carbide coating are as follows:

[0056] (1) The bulk density is 0.40g / cm3 prepared in the form of axial carbon fiber non-weft cloth / carbon mesh tire composite layup and circumferential carbon fiber continuous winding layer alternately stacked and needle punched 3 carbon fiber prefabricated body;

[0057] Among them, the carbon fiber non-weft cloth / carbon mesh tire composite layer contains a layer of carbon fiber non-weft cloth and a layer of carbon mesh tire, and the carbon fiber non-weft cloth / carbon mesh tire composite layer and a layer of carbon fiber continuous winding layer Alternate superposition;

[0058] (2) The carbon fiber preform is subjected to pyrolytic carbon densification treatment by chemical vapor infiltration process, and then mechanically processed to obtain a bulk density of 1.50g / cm 3 The carbon / carbon composite material crucible body 1;

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Abstract

The invention relates to a carbon / carbon composite material crucible containing an aluminum oxide coating and a silicon carbide coating, and belongs to the technical field of thermal field parts for monocrystalline silicon drawing furnaces. The composite material crucible comprises a carbon / carbon composite material crucible body as well as a silicon carbide coating and an aluminum oxide coating which are sequentially coated on the inner surface of the crucible body, the silicon carbide coating effectively relieves thermal mismatch between the aluminum oxide coating and a matrix, impurities are not introduced into the aluminum oxide coating in a silicon melting process, the purity of a silicon material can be effectively ensured, and the service life of the composite material crucible is prolonged. The silicon carbide coating and the aluminum oxide coating are matched for use, so that excellent erosion resistance is achieved, erosion of silicon-containing steam to the composite material crucible body can be effectively avoided, the service life of the composite material crucible is further prolonged, and the requirement for pulling monocrystalline silicon is met.

Description

technical field [0001] The invention relates to a carbon / carbon composite material crucible containing an alumina coating and a silicon carbide coating, and belongs to the technical field of thermal field components for single crystal silicon drawing furnaces. Background technique [0002] In the process of pulling single crystal silicon, the joint action of "carbon / carbon composite material crucible + quartz crucible" is generally used for pulling, such as figure 1 As shown, the quartz crucible is used to carry the silicon material to ensure the purity of the silicon material, and the carbon / carbon composite material crucible is used to carry the quartz crucible to provide strength support. Due to the influence of the working environment when pulling single crystal silicon, the quartz crucible will be softened and deformed under high temperature, and it is not easy to separate from the carbon / carbon composite material crucible, so the old quartz crucible can only be broken ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B41/89C04B35/83C04B35/622C30B29/06C30B15/12
CPCC04B41/89C04B41/52C04B41/009C04B35/83C04B35/622C30B29/06C30B15/12C04B2235/614C04B2235/616C04B2235/48C04B2235/5256C04B2235/608C04B2235/77C04B41/5059C04B41/4531C04B41/4527C04B41/5031
Inventor 张永辉程皓郁荣白鸽程凯峰候雯菲康媛媛
Owner XIAN CHAOMA SCI TECH
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