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Conductive film and temperature sensor film

A technology of temperature sensor and conductive film, used in thermometers, thermometers using electrical/magnetic components directly sensitive to heat, conductive layers on insulating carriers, etc. High performance, durability and reliability

Pending Publication Date: 2022-05-13
NITTO DENKO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

When measuring the temperature of multiple parts in the plane with a thermocouple or a chip thermistor, it is necessary to arrange a temperature sensor for each measurement point and connect each temperature sensor to a printed wiring board, etc., so the manufacturing process will change. cumbersome
In addition, in order to measure the temperature distribution in the plane, it is necessary to arrange many sensors on the substrate, which is a major cause of cost increase.

Method used

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  • Conductive film and temperature sensor film
  • Conductive film and temperature sensor film
  • Conductive film and temperature sensor film

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0095] In the roll-to-roll sputtering device, the roll of the above-mentioned hard-coated film substrate is set, and the sputtering device is exhausted until the vacuum reaches 5 × 10 -3 After Pa, a chromium oxide layer with a thickness of 7 nm and a nickel layer with a thickness of 250 nm were sequentially formed on the hard-coat layer formation surface at a substrate temperature of 80° C. by DC sputtering. The formation of the chromium oxide layer uses a metal Cr target, and introduces oxygen as a reactive gas (O 2 / Ar=1 / 8), with a pressure of 0.3Pa and a power density of 1.4W / cm 2 conditions for film formation. The nickel layer uses a metal nickel target, introduces argon as the sputtering gas, and uses a pressure of 0.3Pa and a power density of 5.0W / cm 2 conditions for film formation.

Embodiment 2

[0097] On the surface of the hard coat layer of the film substrate with a hard coat layer, a chromium oxide layer with a thickness of 7 nm and a silicon oxide (SiO 2 ) layer and a nickel layer with a thickness of 160nm. SiO 2 Layers were formed using a B-doped Si target, and oxygen was introduced as a reactive gas (O 2 / Ar=1 / 8), with a pressure of 0.3Pa and a power density of 1.4W / cm 2 conditions for film formation. The film-forming conditions of the chromium oxide layer and the nickel layer are the same as in Example 1.

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Abstract

The present invention provides a conductive film having a metal thin film on a resin film substrate, and a temperature sensor film obtained by patterning the metal thin film on the resin film substrate. A conductive film (101) for producing a temperature sensor film is provided with a metal thin film (10) on one main surface of a resin film substrate (50) with a chromium oxide thin film (21) as a base layer (20) interposed therebetween. A temperature sensor film is obtained by patterning a metal film to form a temperature measurement resistor part and a lead part connected to the temperature measurement resistor part.

Description

technical field [0001] The present invention relates to a temperature sensor film provided with a patterned metal thin film on a film substrate, a conductive film for producing the temperature sensor film, and a method for producing the same. Background technique [0002] Multiple temperature sensors are used in electronic equipment. Temperature sensors are typically thermocouples or chip thermistors. When measuring the temperature of multiple parts in the plane with a thermocouple or a chip thermistor, it is necessary to arrange a temperature sensor for each measurement point and connect each temperature sensor to a printed wiring board, etc., so the manufacturing process will change. It is cumbersome. In addition, in order to measure the temperature distribution in the plane, it is necessary to arrange a plurality of sensors on the substrate, which is a factor of cost increase. [0003] Patent Document 1 proposes a temperature sensor film in which a metal film is provid...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01B5/14H01B13/00
CPCH01B5/14H01B13/0036G01K2007/163G01K7/18C23C14/08C23C14/205C23C14/027G01K7/16G01K7/183G01K2217/00H01C7/006H01C7/021H01C17/075G01K7/186
Inventor 涩谷克则中岛一裕宫本幸大
Owner NITTO DENKO CORP