Device and method for preparing two-dimensional palladium sulfide nano material
A nano-material, palladium sulfide technology, applied in the field of materials, can solve the problems of inability to achieve large-area uniformity and controllability, complex preparation methods, etc., and achieve the effect of low price, good repeatability, and good uniformity
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Embodiment 1
[0033] This embodiment provides a device for preparing two-dimensional palladium sulfide nanomaterials, including a heating furnace main body 1 (not shown in the specific structure diagram), a quartz tube 2 with an inner diameter of 26 mm and a length of 1050 mm, and an inlet at one end of the quartz tube. The gas port 3, the gas outlet 4 at the other end of the quartz tube, and the first protrusion 21 and the second protrusion 22 of the quartz tube protrude outside the main body of the heating furnace, and the first, second, third and fourth quartz boats (four The models of the quartz boats are exactly the same, with a length of 50 mm, a width of 20 mm, and a height of 10 mm), wherein the first quartz boat 5 is placed in the center, and the second quartz boat 6 is adjacent to a place where the first quartz boat 5 is placed. side, one side of the first quartz boat 5 is closer to the first protrusion 21, the third quartz boat 7 is placed in the quartz tube 2 near the air inlet 3...
Embodiment 2
[0035] The present embodiment provides a method for preparing two-dimensional palladium sulfide nanomaterials by using the device in embodiment 1, comprising the following steps:
[0036] S1. Substrate preparation: split the silicon substrate into two silicon wafers of 1.5cm×1.5cm and place them in a beaker, pour acetone into it to completely immerse the silicon wafers, and set the ultrasonic parameters: ultrasonic frequency 40KHz, ultrasonic power 30% , ultrasonic time 5min, carry out ultrasonic cleaning 5min, place the two silicon wafers processed and cleaned in the fourth quartz boat 8;
[0037] S2. introduce palladium source: after palladium chloride 10g and sodium chloride solid 0.9g are mixed, put into the first quartz boat 5;
[0038] S3. introduce sulfur source: in the second quartz boat 6 and the third quartz boat 7, put the sulfur powder of 10g and the sulfur powder of 9g respectively;
[0039] S4. Environmental treatment of heating furnace: seal the quartz tube, an...
Embodiment 3
[0044] The present embodiment provides a method for preparing two-dimensional palladium sulfide nanomaterials by using the device in embodiment 1, comprising the following steps:
[0045] S1. Substrate preparation: split the silicon substrate into two silicon wafers of 1.5cm×1.5cm and place them in a beaker, pour acetone into it to completely immerse the silicon wafers, and set the ultrasonic parameters: ultrasonic frequency 40KHz, ultrasonic power 30% , ultrasonic time 5min, carry out ultrasonic cleaning 5min, place the two silicon wafers processed and cleaned in the fourth quartz boat 8;
[0046] S2. introduce palladium source: after palladium chloride 10g and sodium chloride solid 1g are mixed, put into the first quartz boat 5;
[0047] S3. introduce sulfur source: in the second quartz boat 6 and the third quartz boat 7, put the sulfur powder of 10g respectively;
[0048] S4. Environmental treatment of heating furnace: seal the quartz tube, and pass argon gas with a flow rat...
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