Method and device for purifying aluminum nitride powder by adopting PVT method

A technology of aluminum nitride and powder, applied in chemical instruments and methods, nitrogen compounds, inorganic chemistry, etc., can solve the problems of equipment becoming hard and brittle, prone to cracks or defects, and limited loading quality, so as to increase the heating uniformity, increase effective output, and prolong service life

Active Publication Date: 2022-08-09
山西中科潞安半导体技术研究院有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007] However, after investigation, it was found that using method 1 and method 3, in the process of purifying aluminum nitride powder, under the process conditions of repeated high temperature and temperature rise and fall, the crystal structure inside the metal material will change, resulting in the equipment becoming hard and brittle , prone to cracks or defects, seriously affecting the service life of the equipment
Moreover, in the process of frequent replacement, on the one hand, it affects the stability of the test, and on the other hand, it increases the cost of aluminum nitride powder purification
[0008] Using method 2, when purifying aluminum nitride powder, since the metal crucible containing the raw materials is inside the graphite crucible, it is easy to introduce C impurities, and the aluminum nitride powder with a high specific surface area accumulates naturally in the metal crucible, and the quality of the charge Severely limited, resulting in low purification efficiency
[0009] In addition, the purification process of aluminum nitride powder is closely related to the internal structure design of the device, the uniformity of powder heating, and the filling state. Explore and research

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  • Method and device for purifying aluminum nitride powder by adopting PVT method
  • Method and device for purifying aluminum nitride powder by adopting PVT method
  • Method and device for purifying aluminum nitride powder by adopting PVT method

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Embodiment 1

[0092] The aluminum nitride powder is purified by the purification method of the first embodiment of the present invention, and its specific implementation process is as follows:

[0093] Step 1. Heat treatment of aluminum nitride powder

[0094] Put the aluminum nitride powder into a tantalum carbide crucible (that is, a metal crucible) with an inner diameter of 44mm and a height of 165mm, a total of 5 tantalum carbide crucibles, and the charging is about 582g, and the total charging per cubic centimeter is about 0.45g , and keep the upper surface of the material about 10mm away from the top cover of the tantalum carbide crucible. After that, cover the top cover of the tantalum carbide crucible and the top cover of the graphite crucible in turn, the graphite crucible has a five-hole structure, and a hard felt crucible is used for physical isolation between the graphite crucible and the tantalum carbide crucible;

[0095] Put the graphite crucible covered with the insulation ...

Embodiment 2

[0105] The aluminum nitride powder is purified by the purification method of the second embodiment of the present invention, and its specific implementation process is as follows:

[0106] Step 1. Prefabricated cylindrical aluminum nitride powder

[0107] Using plastic cylinders, cylindrical aluminum nitride is prefabricated by mechanical extrusion. Its diameter is 2 mm lower than that of a tungsten crucible (ie, a metal crucible), and its height is 10 mm lower than that of the tungsten crucible, and the density of the prefabricated cylindrical aluminum nitride is about 1.2 g per cubic centimeter of mass.

[0108] Step 2, high temperature impurity removal

[0109] Put the prefabricated cylindrical aluminum nitride in the above-mentioned step 1 into a tungsten crucible with an inner diameter of 44mm and a height of 165mm, a total of 5 tungsten crucibles, charging about 1552g, so that the upper surface of the material is kept about 10mm from the top cover of the tungsten crucib...

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Abstract

The invention belongs to the technical field of semiconductors, and relates to a device and a method for purifying aluminum nitride powder by adopting a PVT method, the device comprises a graphite crucible (1), a plurality of mounting holes (2) are arranged in the graphite crucible (1), a hard felt crucible (3) is arranged in each mounting hole (2), and a metal crucible (4) is arranged in each hard felt crucible (3). The method is realized by adopting the device, and comprises the following steps: putting the aluminum nitride powder into the device, and purifying through high-temperature impurity removal and powder grinding. By the adoption of the technical scheme, efficient impurity removal in the aluminum nitride AlN powder purification process can be achieved, and the technical effect of effective output is improved.

Description

technical field [0001] The invention belongs to the technical field of semiconductors, and relates to a device and a method for purifying aluminum nitride powder, in particular to a method and device for purifying aluminum nitride powder by PVT method. Background technique [0002] Aluminum Nitride (AlN) material has a wide band gap of -6.2ev and a high breakdown field strength of -1.17×10 7 V / cm, high electron mobility - 1100cm 2 / (V·S), high thermal conductivity and other excellent properties. It has broad application prospects in deep ultraviolet optoelectronic devices, microwave power devices and electronic devices. From the current research progress at home and abroad, the physical vapor transport method (PVT method) is a more effective method to prepare high-quality, low-defect aluminum nitride (AlN) crystalline materials. [0003] At present, the aluminum nitride powder on the market is white or off-white, and the content of metal and C and O impurities is relative...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B21/072C30B23/00C30B29/40
CPCC01B21/0728C30B29/403C30B23/00C01P2006/80Y02P20/10
Inventor 王充张童常煜鹏李晋闽
Owner 山西中科潞安半导体技术研究院有限公司
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