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Gamma-Fe2o3-based benzene gas sensing device and its making process

A gas-sensitive, manufacturing method technology, applied in material resistance and other directions, can solve the problems of high price, wide application, low sensitivity, etc., and achieve the effect of improving the dynamic response range, enhancing the gas-sensing mechanism, and high resolution.

Inactive Publication Date: 2004-04-07
SHANDONG NORMAL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Benzene gas is highly toxic, and will cause harm to people who have been inhaled in excess for a long time or a short time. It has attracted great attention from functional departments to improve the working conditions in the workplace and protect the personal safety and health of workers; the world's leading The leading gas sensor manufacturer - TGS822 organic solvent gas sensor produced by Figaro Technology Research Co., Ltd. of Japan is made of tin dioxide (SnO 2 ) as a matrix material, its gas sensitivity has a broad spectrum; the second is expensive and cannot be widely used in my country; γ-Fe 2 o 3 with SnO 2 Compared with the two series of γ-Fe and ZnO, it has strong resistance to humidity and temperature, and has the characteristics of low sensitivity to alcohol, but there is no relevant γ-Fe 2 o 3 Public reports on benzene-based gas-sensitive devices

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0029] Example 1: γ-Fe 2 o 3Benzene-based gas sensitive device, adopts side-heating element structure, and the surface of the tube core is coated with γ-Fe 2 o 3 Base sensitive materials to form gas-sensitive elements. Sensitive material components are: yttrium-containing γ-Fe 2 o 3 fine powder, SnSO 4 , SnO, SnCl 3 , AuCl 3 , and pickling asbestos, the weight ratio is 1:0.20:0.04:0.04:0.01:0.06 accordingly.

[0030] The manufacturing method steps are as follows:

[0031] (1) γ-Fe containing yttrium 2 o 3 Preparation of fine powder

[0032] Molby Y 2 o 3 : γ-Fe 2 o 3 = 1:10, the quantitative Y 2 o 3 Dissolved in dilute nitric acid to form Y(NO 3 ) 3 solution,

[0033] Dry in an oven at 80°C to get Y 2 o 3 Crystals. Quantitative iron nitrate Fe(NO 3 ) 3 9H 2 O dissolved in ethylene glycol, Y 2 o 3 Put the crystals into a three-neck bottle together, use the sol-gel method, reflux at 70°C to obtain a sol, distill at 80°C to obtain a gel, dry it with a ...

Embodiment 2

[0038] Example 2: γ-Fe 2 o 3 Benzene-based gas sensitive device, the sensitive material component is: γ-Fe containing yttrium 2 o 3 fine powder, SnSO 4 , SnO, SnCl 3 , AuCl 3 , and pickling asbestos, the weight ratio is 1:0.25:0.06:0.06:0.02:0.08 accordingly.

[0039] The manufacturing method is as described in Example 1, and the difference is that step (1) γ-Fe containing yttrium 2 o 3 The preparation of fine powder is based on molar ratio Y 2 o 3 : γ-Fe 2 o 3 =1:8.

Embodiment 3

[0040] Example 3: γ-Fe 2 o 3 Benzene-based gas sensitive device, the sensitive material component is: γ-Fe containing yttrium 2 o 3 fine powder, SnSO 4 , SnO, SnCl 3 , AuCl 3 , and pickling asbestos, the weight ratio is 1:0.15:0.06:0.08:0.03:0.08 accordingly.

[0041] The manufacturing method is as described in Example 1, and the difference is that step (1) γ-Fe containing yttrium 2 o 3 The preparation of fine powder is based on molar ratio Y 2 o 3 : γ-Fe 2 o 3 =1:12.

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Abstract

The present invention is one kind of gas-sensitive MOS sensor and its making technology. The gamma-Fe2O3 based benzene gas sensing device has the die surface sensing material comprising fine Y-containing gamma-Fe2O3 powder, SnSO4, SnO, SnC13, AuC13 and pickled asbestos. The fine Y-containing gamma-Fe2O3 powder is prepared through dissolving Fe(NO3)3.9H2O in glycol, refluxing with Y2O3 crystal, distillation, drying to obtain dry gel, and heat treatment. The gas ensing device is made with the said components and through grinding, painting, drying in the air and low temperature long time sintering. The said gas sensing device has high sensitiity, high resolution and high stability.

Description

(1) Technical field [0001] The invention relates to a metal oxide semiconductor gas sensor and its production technology, in particular to γ-Fe 2 o 3 A base-responsive benzene-based gas sensitive device and a preparation method thereof. (2) Background technology [0002] Benzene, toluene, and xylene are referred to as benzene, and are organic solvents used as solvents, thinners, and cleaning agents in the chemical industry, rubber manufacturing industry, architectural decoration industry, and semiconductor device manufacturing industry. Benzene gas is highly toxic, and will cause harm to people who have been inhaled in excess for a long time or a short time. It has attracted great attention from functional departments to improve the working conditions in the workplace and protect the personal safety and health of workers; the world's leading The leading gas sensor manufacturer - TGS822 organic solvent gas sensor produced by Figaro Technology Research Co., Ltd. of Japan is ...

Claims

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Application Information

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IPC IPC(8): G01N27/04G01N27/14
Inventor 裴素华周忠平
Owner SHANDONG NORMAL UNIV
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