Method and system for preparing high polymer group biochip micro flow path structure adopting quasi molecule laser

Abstract

The present invention belongs to the field of laser fine machining technology. The preparation process includes determining light spot area; setting work voltage; setting machining parameters and mask pattern based on the size and cross section shape of micro flow passage; drawing based on the micro flow passage structure and creating and storing the data file; reading out the data file and machining parameters and driving the bench and laser to complete the substrate machining; perforating in the foregoing steps or in conventional process to machining cover plate; and bonding the substrate and the cover plate. The preparing system includes computer, the computer controlled quasi-molecular laser and driving motor, bench, workpiece set on the bench, reflector to alter the optical path the laser beam of the quasi-molecular laser, mask rotating platform and imaging objective. The present invention can fast forming biochip in high flexibility, high reliability and low cost.

Description

technical field [0001] The method and system for preparing polymer-based biochip microfluidic structure by excimer laser belong to the technical field of laser microprocessing, and mainly relate to microfluidic processing on microfluidic biochips with high polymers as substrates. Background technique [0002] Biochip technology is a new technology developed since the early 1990s. It is the cross product of molecular biology and microelectronics, micromachining, micromechanics and other disciplines. The essence of a biochip is a reduced biochemical analyzer. A biochip made by micro-processing technology integrates micron structures and biochemical processing into a small chip made of silicon oxide, glass or plastic. . The original biochip was mainly used for DNA sequence detection, gene expression profile identification, etc., so it is also called a gene chip. At present, the research on biochips is focusing on microfluidic chips, and its main types are PCR. The main featu...

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Problems solved by technology

However, these methods can only be limited to materials widely used in integrated circuits such as silicon and glass, and need to go through multiple processes such as gluing, exposure, development, fixing, and drying. Therefore, the processing time is long, the process is complicated, and the operation level is required. high

It is difficult to adapt to the requirements of mass production and cost reduction of chips

In addition, the current processing methods for polymer biochips mainly include hot pressing, injection molding, embossing, etc. These methods rely on molds and have poor processing flexibility.

Unable to meet the needs of rapid development of microfluidic biochips with different structures

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