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Plasma injection method and apparatus for insulation material spare parts

A technology of insulating materials and plasma, applied in ion implantation plating, metal material coating process, coating, etc., can solve the problems that the potential of insulating materials cannot be applied and is difficult to achieve

Inactive Publication Date: 2005-04-06
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the conditions for obtaining such injection are: the workpiece needs to be conductive, and the potential cannot be applied to the insulating material, so the injection is difficult to achieve

Method used

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  • Plasma injection method and apparatus for insulation material spare parts
  • Plasma injection method and apparatus for insulation material spare parts
  • Plasma injection method and apparatus for insulation material spare parts

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Experimental program
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Effect test

specific Embodiment approach 1

[0005] Embodiment 1: Insulating material parts plasma injection method, insulating material parts 1 are arranged in the vacuum chamber 2, the vacuum chamber 2 communicates with the plasma source 3, and a pulsed high-voltage power supply is arranged outside the insulating material parts 1 The metal strip 4 or the metal cylinder grid 5 of the negative electrode controls the relative rotation between the metal strip 4 or the metal cylinder grid 5 and the insulating material component 1 to realize the plasma injection of the insulating material component. The core of the invention is to obtain an equivalent negative potential near the surface of the columnar insulating part to attract ions in the plasma to promote the injection effect.

specific Embodiment approach 2

[0006] Specific embodiment two: Referring to Fig. 1, the plasma injection device for insulating material parts in this embodiment includes a vacuum chamber 2 communicated with a plasma source 3, and a columnar insulating material part 1 is arranged in the vacuum chamber 2, and the columnar Parts 1 made of insulating material are placed on a workpiece platform 7, which is connected to the external motor shaft 8 through a dynamic seal, and metal strips 4 are fixed around the parts 1 of insulating material, and the metal strip 4 is connected to the parts made of insulating material. The axes of the components 1 are parallel, and the metal strip 4 is connected to the negative pole of the pulse high-voltage power supply.

specific Embodiment approach 3

[0007] Specific embodiment three: Referring to Fig. 2, the difference between this embodiment and specific embodiment two is that the metal strip 4 is replaced by a metal barrel grid 5, and the metal barrel grid 5 is cylindrical, and the cylindrical metal barrel grid 5 Sleeved on the outside of the columnar insulating material part 1, and its axis coincides with the axis of the columnar insulating material part 1, the metal cylinder grid 5 has only warp threads and no weft threads.

[0008] The rotation of the motor can form the relative rotation of the insulating workpiece and the conductive cylindrical metal cylinder grid. When the high-voltage pulse is applied to the metal grid, the ions in the plasma will fly to the grid under the influence of the sub-potential of the grid. Since the grid has a large gap, most of the ions will fly through the grid gap. Injection into the interior of the workpiece of insulating material. But at this time, the shadow effect caused by the me...

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Abstract

The insulation material spare part plasma pours into the method and its pours into the installment, involves a kind and pours into the installment to the insulation material spare part ion implantation method. The traditional plasma pours into the condition is the work piece can the electric conduction, is unable regarding the insulation material to pour into. The invention pours into the method, is in the insulation material spare part (1) exterior establishment meets the pulse high pressure power source cathode, may bonding jumper which relatively revolves with the insulation material spare part (4) or metal cylinder grid (5). The invention pours into the installment, the insulation material spare part (1) through moves the seal and the electricity engine shaft (8) is connected, in states the insulation material spare part (1) periphery fixedly has the bonding jumper (4) or the metal cylinder grid (5); Another kind of equipment, in insulation material spare part (1) periphery is equipped with with the electricity engine shaft (8) the connected bonding jumper (4) or the metal cylinder grid (5). The invention installment and the method may process a bigger area the insulation material spare part, this processing method efficiency high, the effect is good; The invention installment structure simple, the production cost is low, favor the promoted application.

Description

Technical field: [0001] The invention relates to an ion implantation method and implantation device for parts made of insulating materials. Background technique: [0002] Parts made of insulating materials have been widely used in industry, such as glass products, ceramic products, polymer products, etc. In order to obtain specific surface properties, such as higher wear resistance, toughness, hardness, electrical conductivity, etc., the surface needs to be treated. Ion implantation has proven to be an effective method for surface modification of insulating materials. However, traditional ion implantation requires scanning if the implanted area is large, and for non-planar parts, the workpiece table needs to be operated so that the implanted surface faces the ion source, otherwise the implantation depth will decrease and the sputtering effect will increase. In order to improve processing efficiency, easy operation and reduce equipment cost, a variant of ion implantation: p...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/48
Inventor 田修波杨士勤
Owner HARBIN INST OF TECH
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