MEMS micro high sensitivity magnetic field sensor and manufacturing method

A magnetic field sensor, high-sensitivity technology, applied in the size/direction of the magnetic field, the use of magneto-optical equipment for magnetic field measurement, instruments, etc.
CN1912646AActive Publication Date: 2007-02-14SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Applications(China)
Current Assignee / Owner
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
Publication Date
2007-02-14

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Abstract

A MEMS micro type of magnetic field transducer with high sensitivity consists of MEMS twisted micro lens with two fixed ends, magnetism sensitive film and collimator with double optical fiber. It is featured as forming twist space of component between metal feedback electrode and magnetism sensitive film, packaging said collimator by utilizing optical package resin through regulation frame. Its preparing method is also disclosed.
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Description

technical field

[0001] The invention relates to a structure and a manufacturing method of a miniature high-sensitivity magnetic field sensor, in particular, utilizes semiconductor microfabrication technology combined with semiconductor materials to realize the structural manufacture of the miniature high-sensitivity magnetic field sensor. Through different packages, the device can detect magnetic fields in various environments such as vacuum, air, and underwater. The invention belongs to the field of magnetic field sensors. Background technique

[0002] The magnetic field sensor is a sensor sensitive to magnetic signals or parameters that can be converted into magnetic signals. It is the earliest and most widely used type of sensor. The compass, one of my country's four great inventions, is a sensor that utilizes this phenomenon. Magnetic field sensors have been industrialized in many fields, with an annual usage of more than one billion pieces, widely used in motors, elect...

Claims

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