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Method for treating waste gas by using metal thin film adsorption and desorption

A metal thin film, adsorption treatment technology, applied in separation methods, chemical instruments and methods, metal material coating processes, etc., can solve problems such as gas pollution, and achieve the effects of energy saving, wide application value, and simple process.

Inactive Publication Date: 2007-08-08
汪洋
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Problems solved by technology

[0003] The purpose of the present invention is to provide a method for solving the problem of gas pollution by utilizing the adsorption and desorption of gas by the reusable titanium dioxide film

Method used

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  • Method for treating waste gas by using metal thin film adsorption and desorption

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Embodiment

[0016] Example: Using ZDL-2051 vacuum coating machine to evaporate TiO 2 Thin film, ZDL-2051 vacuum coating machine, is composed of vacuum system, control system, combined evaporation source, ion bombardment source, workpiece turret and evaporation table, and added quadrupole mass spectrometry temperature programmed thermal desorption TPD detection gas equipment, The quadrupole mass spectrometer temperature programmed thermal desorption TPD device is composed of an exhaust system, a measurement system and a temperature control system. The vacuum chamber specification of the vacuum coating machine is Φ2050×2900mm, and the ultimate vacuum degree and working vacuum degree are 1×10 -3 Pa and 2×10 -2 Pa, restore the original vacuum degree for the second time in less than 7 minutes, the static leak rate is 1.0Pa / s, the total power of the equipment is 200KVA, the air source inlet pressure is greater than 0.6Mpa, and the total water consumption is 9M 3 / h.

[0017] The film of envi...

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Abstract

The invention discloses a waste gas adsorbing method through metal oxide film, which comprises the following steps: adding TPD (Temperature Programmed Desorption) on the vacuum coater; coating high-purity transition metal oxide mixture powder on the resistance silk of coater; controlling temperature between 800 and 1400 deg.c to evaporate in the vacuum for 28-200 deg.c; depositing metal oxide on the base to form TiO2 film; extracting coater into vacuum between 0.6X10-3Pa and 6X10-3Pa; cooling to indoor temperature; conducting NO waste gas; controlling the base temperature between 400 and 700 deg.c for 10-28 min; extracting into vacuum; cooling to indoor temperature; finishing processing the waste gas.

Description

technical field [0001] The invention relates to the technical field of environmental protection, in particular to a method for absorbing and desorbing waste gas by using a metal oxide film. Background technique [0002] Air pollution has become a concern of all countries in the world. The rapid economic development, large-scale industrial production and the increase of vehicle exhaust have seriously polluted the air and damaged the ecological environment. In recent years, with the development of nanomaterials, the microstructure, mechanism, and performance of thin films have also been extensively studied. Regarding the use of green environmental protection materials TiO 2 Adsorption of hydroxide ions on thin films has also been reported. In addition, titanium dioxide (TiO 2 ) As an important semiconductor material, it has the advantages of high photochemical stability, non-toxic, odorless, and low cost, and is widely used as photocatalysis. Non-toxic (such as changes in t...

Claims

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Application Information

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IPC IPC(8): B01J21/06B01J37/02B01D53/86B01D53/56C23C14/08
Inventor 汪洋
Owner 汪洋
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