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Micro-drive structure for implementing coplane and off-plane movement

A technology of micro-drive and motion, applied in the direction of micro-structure technology, micro-structure devices, manufacturing micro-structure devices, etc., can solve the single co-planar or out-of-plane motion of the drive structure, limit the performance and application fields of devices, and make it difficult to co-planar and Problems such as out-of-plane movement can be achieved to achieve mass production, reduce internal stress, and improve quality

Active Publication Date: 2008-08-20
PEKING UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the electrostatic driving method is limited by the driving principle and process technology. Generally, the driving structure can only achieve a single in-plane or out-of-plane motion, and it is difficult to achieve both in-plane and out-of-plane motion, which greatly limits the performance and application fields of the device.

Method used

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  • Micro-drive structure for implementing coplane and off-plane movement
  • Micro-drive structure for implementing coplane and off-plane movement
  • Micro-drive structure for implementing coplane and off-plane movement

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0041] Embodiment 1: When making a micro-drive structure of a single-ended unequal-height support beam, the following processes are mainly adopted:

[0042] 1. The starting material is a double-polished N-type (100) silicon wafer 11 (as shown in FIG. 6a ), with a thickness of 400±10 microns;

[0043] 2. Form a silicon oxide mask 12 on the silicon wafer 11, and then etch a deep groove 13. The depth of the deep groove 13 determines the gap between the fixed electrode 3 and the movable electrode 5 on the glass substrate;

[0044] 3. As shown in FIG. 6b, the silicon oxide mask 12 is removed, and the surface of the silicon wafer 11 is doped with boron 14 by ion implantation or diffusion process to form an ohmic contact;

[0045] 4. As shown in FIG. 6c, metal electrodes 15 are fabricated on the glass substrate 8 as lead electrodes of the micro-drive structure;

[0046] 5. As shown in FIG. 6d, the glass substrate 8 and the silicon wafer 11 are anodically bonded, and the silicon wafe...

Embodiment 2

[0049] Embodiment 2: When making the micro-drive structure of the double-end unequal height support beam, the following processes are mainly used:

[0050] 1. The starting material is a double-polished N-type (100) silicon wafer 11 (as shown in FIG. 6a ), with a thickness of 400±10 microns;

[0051] 2. First, a silicon oxide mask 19 is formed on the silicon wafer 11, and then a photoresist mask 20 is formed on the surface of the silicon oxide mask 19 (as shown in FIG. 7 a ), and then a composite mask of silicon oxide and photoresist is formed. Then take the photoresist 20 as the mask etching deep groove 21 (as shown in Figure 7b), the depth of deep groove 21 determines the lower end of combined torsion beam 7 and folded beam 6 (comprising beams such as 71,72,73) height difference (as shown in Figure 7c);

[0052] 3. Remove the photoresist mask 20, and use the silicon oxide mask 19 as a mask to etch the silicon wafer 11 to form a deep groove 22. The depth of the deep groove 22...

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Abstract

The invention relates to a coplanar and off-plane micro driving structure and the preparation method. The driving structure comprises fixed electrodes, movable electrodes, support beams, a glass base and a drive output, wherein the fixed electrodes comprise a comb-finger fixed electrode connected at both sides of the glass base top surface and a flat plate fixed electrode which is fixed at the central section of the glass base top surface; the movable electrodes comprise two comb-finger movable electrodes which insert in the comb-finger fixed electrode and two flat plate movable electrodes respectively arranged above the flat plate fixed electrode; the support beams comprise a folded beam and a composite torsion beam. The coplanar and off-plane micro driving structure can not only realize the coplanar movement along the X axis direction through the interaction between the comb-finger movable electrodes and the fixed electrodes, but also realize the off-plane torsion movement of the driving output through the interaction between the movable electrodes and the fixed electrodes. The coplanar and off-plane micro driving structure has the advantages of simple processing and is compatible with a plurality of MEMS devices process, thus applicable to glimmer integrated system with more powerful function.

Description

technical field [0001] The invention relates to a driving structure and a preparation method thereof, in particular to a micro-driving structure capable of realizing in-plane and out-of-plane motion and a preparation method thereof. Background technique [0002] Micro-Electro-Mechanical Systems (MEMS) have broad application prospects in national defense and civilian fields, and are now attracting much attention as an emerging technology. Micro-actuator, as a key drive component to realize micro-operation, is the core of MEMS. In micro-electromechanical systems, micro-actuators can realize multi-dimensional motion functions through in-plane motion and out-of-plane motion. Multi-dimensional motion micro-actuators have important and extensive application prospects in MEMS. For example, compared to sensors based on single-dimensional motion drives, sensors based on multi-dimensional motion drives (such as multi-dimensional position sensors, multi-dimensional force sensors and m...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81B7/02H02N13/00B81C1/00
Inventor 吴文刚陈庆华王子千闫桂珍郝一龙王阳元
Owner PEKING UNIV
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