Microwave plasma flare waveguide excitation cavity

Abstract

The invention provides a micro-wave plasma torch waveguide excitation chamber, relates to an atmosphere microwave plasma torch (APT) excitation chamber without a built-in igniter under high pressure and belongs to the field of microwave plasma torch excitation technique. The excitation chamber consists of three sections of waveguides, a perforated metal film and a short circuit board; the microwave field strength of a discharging region is improved by dual measures of compressing the height of the narrow edge of the waveguide and forming a TE103 type resonator, thus saving the igniter or an ignitor and greatly improving the utilization ratio of the microwave power which is also called the conversion efficiency of the microwave discharging. Without any igniters or ignitors, the excitation chamber adopts smaller microwave power so as to use the excitation chamber to excite the microwave plasma torch (APT) under atmosphere pressure, has simple structure of device, high conversion efficiency, high torch electron temperature and electronic density and stable operation. The excitation chamber can be applied to a plurality of microwave industrial application technical fields, more especially used as the igniters of various boiler burners.

Description

Technical field [0001] The invention belongs to the field of microwave plasma torch excitation technology and devices, and particularly relates to the design and use of an atmospheric microwave plasma torch (APT) excitation cavity without a built-in igniter under high pressure. Background technique [0002] Microwave plasma is a quasi-balanced low temperature plasma with high electron density and temperature. Compared with direct current and radio frequency plasma, it has many advantages and particularities. Therefore, it has been widely used in the past ten years. Applications, especially in microelectronics technology, new material preparation and synthesis, aerospace technology, chemistry and chemical engineering, waste treatment, metal extraction, packaging materials and pharmaceutical industries, film deposition, plasma polymerization, microcircuit manufacturing to welding, tool hardening, Ultrafine powder synthesis, plasma spraying, plasma metallurgy, plasma chemical indust...

AI Technical Summary

Problems solved by technology

Therefore, a quarter coaxial resonant cavity with one end short-circuited and the other end open-circuited, or a standing wave field formed by a compressed waveguide is usually used to increase the microwave electric field at the discharge position. These exciting devices often require an igniter to be installed in an appropriate position Or the ignition pole, in order to generate the initial discharge under a certain microwave power, and then transition to the formation of the entire torch, which complicates the structure of the entire device and increases the cost

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