Process for producing YBCO superconducting thin film target material

A technology of superconducting thin film and target material, which is applied in the field of YBCO superconducting thin film target material preparation, can solve the problems of large internal stress of the sheet, high preparation cost, high cost of rubber sheathing, etc. Excellent superconductivity and low sheath cost

Inactive Publication Date: 2009-07-29
SOUTHWEST JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

During dry pressing, high pressure is applied to the powder in the axial direction at one time, and the pressure is high, and the pressure is applied in a single direction, rather than equal pressure in all directions, so that the internal stress of the formed sheet is large, resulting in The superconducting target is easy to break when demoulding, and the target is damaged; if the pressure is directly reduced, the density of the target will be insufficient, which will eventually affect the quality of the film
2. Hot isostatic pressing: Hot isostatic pressing is performed on superconducting powder, that is, nitrogen or argon is used as the pressurized medium in a heated state, and the superconducting powder in the metal sheath is subjected to hot isostatic pressing to directly make a target It does not need to be sintered, and its disa

Method used

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  • Process for producing YBCO superconducting thin film target material

Examples

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Embodiment 1

[0024] A specific embodiment of the present invention is a method for preparing a YBCO superconducting thin film target, which is as follows:

[0025] A, Preparation of YBCO superconducting phase powder

[0026] According to the stoichiometric ratio of Y (yttrium): Ba (barium): Cu (copper) = 1:2:3, weigh Y respectively 2 o 3 (yttrium oxide), BaCO 3 (barium carbonate), CuO (copper oxide), and then Y 2 o 3 Mix and grind with CuO, then add BaCO 3 Mix and grind into powder, sinter the powder at 920°C for 20 hours, and grind the sintered product into powder; repeat the above sintering and grinding twice to obtain superconducting phase powder. In this example, a total of 3 sinterings were performed.

[0027] B. Tablet

[0028] The powder prepared in step A is evenly placed in the mould, and pressed into tablets with a pressure of 20Mpa on a press; guide sheet;

[0029] C. Sintering of sheets

[0030] Sintering the superconducting sheet obtained in step B in a box furnace f...

Embodiment 2

[0035] A kind of preparation method of YBCO superconducting film target material, its practice is:

[0036] A, Preparation of YBCO superconducting phase powder

[0037] According to the stoichiometric ratio of Y:Ba:Cu=1:2:3, weigh Y respectively 2 o 3 、BaCO 3 , CuO, and then Y 2 o 3 Mix and grind with CuO, then add BaCO 3 Mix and grind into powder, sinter the powder at 960°C for 30 hours, and grind the sintered product into powder; repeat the above sintering and grinding 4 times to obtain superconducting phase powder. A total of 5 sinterings were carried out in this example.

[0038] B. Tablet

[0039] The powder prepared in step A is evenly placed in the mould, and pressed into tablets with a pressure of 30Mpa on a press; guide sheet;

[0040] C. Sintering of sheets

[0041] Sintering the superconducting sheet obtained in step B for 30 hours in a box furnace at a sintering temperature of 960°C;

[0042] D. Oxygen penetration

[0043] The superconducting sheet after ...

Embodiment 3

[0045] A kind of preparation method of YBCO superconducting film target material, its practice is:

[0046] A, Preparation of YBCO superconducting phase powder

[0047] According to the stoichiometric ratio of Y:Ba:Cu=1:2:3, weigh Y respectively 2 o 3 、BaCO 3 , CuO, and then Y 2 o 3 Mix and grind with CuO, then add BaCO 3 Mix and grind into powder, sinter the powder at 940°C for 25 hours, and grind the sintered product into powder; repeat the above sintering and grinding 3 times to obtain superconducting phase powder;

[0048] B. Tablet

[0049] The powder prepared in step A is evenly placed in the mould, and the tablet is pressed with a pressure of 25Mpa on the press; guide sheet;

[0050] C. Sintering of sheets

[0051] Sintering the superconducting sheet obtained in step B in a box furnace for 25 hours at a sintering temperature of 950°C;

[0052] D. Oxygen penetration

[0053] The superconducting sheet sintered in step C is placed in a tube furnace, and subjecte...

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Abstract

The invention provides a method for preparing YBCO superconducting film target materials. The method comprises the following: A, a step of preparing YBCO superconducting-phase powder; B, a step of preforming, which is to put the powder prepared in a step A in a die, compress the powder by use of the pressure of between 20 and 30 MPa on a press so as to manufacture a sheet, put the sheet obtained through compression in a rubber sleeve, perform cold isostatic pressing under the pressure of between 150 and 200 MPa and obtain a superconducting sheet; C, a step of sintering the sheet, which is to sinter the superconducting sheet obtained in a step B in a box-type furnace for 20 to 30 hours at a sintering temperature of between 850 and 960 DEG C; and D, a step of performing oxygen permeation, which is to put the superconducting sheet sintered in a step C in a tubular furnace, perform oxygen permeation treatment for 2 to 3 hours at a temperature of between 450 and 500 DEG C and obtain the target material. The target material prepared by the method has the advantages of uniformity, good shape, high density and good superconducting performance. In addition, the method is low in cost and suitable for the mass production of the target material.

Description

technical field [0001] The invention relates to the preparation of a superconducting material, in particular to a method for preparing a YBCO superconducting film target. Background technique [0002] Yttrium barium copper oxide (YBCO) superconducting thin film is widely used in many fields because of its high critical current density and high critical magnetic field. It can be used as a microwave device in the field of microelectronics to achieve the effect of reducing noise; it can be used as a superconducting tape in the field of power transmission; it can be used in superconducting computers or other fields to make superconducting quantum interference devices (SQUID); In the field of magnetic energy storage, it is used to make superconducting coils. Therefore, countries all over the world have paid great efforts for YBCO superconducting thin films. The existing YBCO superconducting film preparation methods include: pulse laser method, magnetron sputtering method, chemi...

Claims

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Application Information

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IPC IPC(8): C04B35/45C04B35/622H01B12/00C23C14/35
CPCY02E40/64Y02E40/60
Inventor 李璟张勇赵勇祐卫国张贵东
Owner SOUTHWEST JIAOTONG UNIV
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