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Corrosion-resistant member and method for producing the same

A corrosion-resistant and corrosion-resistant technology, applied in the field of corrosion-resistant components and their preparation, to achieve the effects of reducing maintenance frequency, preventing adhesion and prolonging life.

Inactive Publication Date: 2009-09-02
CANAAN PRECISION
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] However, it is not known that the treated member can prevent the adhesion of pollutants for a long time, making it highly resistant to acid and plasma

Method used

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  • Corrosion-resistant member and method for producing the same
  • Corrosion-resistant member and method for producing the same

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1 and comparative example 1

[0125] Spray superheated steam on the polished surface (MFA surface) of quartz glass (250mm×250mm×5mm) for 30 minutes (nozzle outlet temperature 470°C, flow rate 60kg / hour) to perform surface treatment to obtain a corrosion-resistant member . The temperature of the surface to be treated (surface) was measured and found to be 420°C. In Comparative Example 1, the same quartz glass as above was used without superheated steam treatment.

Embodiment 2 and comparative example 2

[0127] On the #320 sandpaper friction surface of quartz glass (250mm * 250mm * 5mm), the superheated steam of spraying 30 minutes (nozzle outlet temperature 470 ℃, flow rate 60kg / hour) is the same as embodiment 1 except that, obtains Corrosion resistant components. The temperature of the surface to be treated (surface) was measured and found to be 420°C. In Comparative Example 2, quartz glass having the same #320 sandpaper friction surface as above was used without superheated steam treatment.

Embodiment 3 and comparative example 3

[0129] For the aluminum plate A6061 (aluminum-magnesium-silicon alloy) (aluminum-magnesium-silicon alloy) (dry etching device) with many micropores formed at intervals of 25 mm in the vertical and horizontal directions, and subjected to sulfuric acid alumite processing (hard alumite treatment) and sealing treatment The upper electrode, 250mm×250mm×12mm) is sprayed with superheated steam for 20 minutes (nozzle outlet temperature is 470°C, flow rate is 60kg / hour) for surface treatment. The micropores were formed by a first hole portion having an average diameter of 2 mm×a depth of 9 mm and a second hole portion extending from the bottom of the hole portion with an average diameter of 0.5 mm×a depth of 3 mm. The temperature of the surface to be treated (surface) was measured and found to be 412°C. In Comparative Example 3, the same aluminum plate as above was used without superheated steam treatment.

[0130]For the members of Examples and Comparative Examples, the wettability i...

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Abstract

Disclosed is a corrosion-resistant member which is high in acid resistance, plasma resistance and hydrophilicity. Also disclosed is a method for producing such a corrosion-resistant member. A corrosion-resistant member having high acid resistance, plasma resistance and hydrophilicity is obtained by surface-treating an object member (such as ceramics and metals) by spraying a superheated water vapor at a temperature of 300-1000 DEG C. The corrosion-resistant member may be a member which is in contact with a processing space within a vapor-phase surface treatment apparatus (such as a chamber) for surface-treating a base material by a vapor-phase process such as PVD, CVD or dry etching.

Description

technical field [0001] The present invention relates to a device (semiconductor manufacturing device, liquid crystal display device, etc.) that has high acid resistance, plasma resistance, and hydrophilicity, as a device (semiconductor manufacturing device, liquid crystal display device, etc.) that performs surface processing (microfabrication, thin film processing, etc.) on a base material or a substrate, for example, by a vapor phase method display devices, etc.), a corrosion-resistant member (or modified treatment member) that is beneficial to long-term maintenance of acid resistance and plasma resistance, its preparation method, surface treatment method, and the treated member obtained by this method. Background technique [0002] In microfabrication and thin film technologies such as semiconductors and liquid crystal display devices, substrates or substrates can be subjected to vapor phase surface treatment, such as physical vapor deposition, chemical vapor deposition, e...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C26/00C03C23/00C23C28/04C25D11/18
CPCC03C15/00C04B41/009C23C16/4404C25D11/18C23C26/00C25D11/02C25D5/48C25D11/246C03C23/006C23C8/16C23C4/02C23C30/00C04B41/85C04B41/502Y10T428/13Y10T428/24273C04B41/4529C04B35/00C03C23/00C25D11/08
Inventor 小林敏夫森川良实高柳晃一郎
Owner CANAAN PRECISION
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