Process for producing superconducting oxide material
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A manufacturing method and oxide technology, applied in chemical instruments and methods, cable/conductor manufacturing, copper compounds, etc., can solve problems such as difficulty in orientation control, uniformity decline, etc., to achieve improved superconducting characteristics and high manufacturing efficiency , suitable for mass production
Active Publication Date: 2009-09-23
NAT INST OF ADVANCED IND SCI & TECH +1
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Problems solved by technology
[0008] The present inventors aim at the fact that in the conventional manufacturing method of superconducting materials, it takes a lot of time to thermally decompose the metal organic compound and form the superconducting substance through heat treatment, and it is difficult to control the orientation. In order to solve the above-mentioned problems due to the fact that the uniformity is lowered due to the reaction of metal organic compounds, a method for efficiently producing a high-performance superconducting material was found when performing thermal decomposition of metal organic compounds and formation of superconducting substances by heat treatment, and Patent applied for (see Patent Document 5)
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Embodiment 1
[0117] The coating solution Y1 was spin-coated on the substrate KC1 at 4000 rpm for 10 seconds, dried in a constant temperature bath at 130° C. to remove the solvent, and then irradiated with laser light H1 at room temperature. At this time, the intensity of the laser is set to 16.4mJ / cm 2 The laser scans in one direction, and irradiates with pulse numbers of 10,000, 20,000, 30,000, and 40,000 on one side.
[0118] Other irradiation conditions are as follows.
[0119] room temperature, atmosphere
[0120] Frequency: 100Hz
[0121] Overlap rate: 99%
[0122] Next, the laser-irradiated sample was inserted into a muffle furnace previously kept at 500° C., kept at this temperature for 30 minutes, and then taken out. Then, main firing was performed in a quartz tubular furnace under the following conditions.
[0123] First, in the mixed gas flow of argon and oxygen with the oxygen partial pressure adjusted to 100ppm, the temperature was raised to 770°C at a rate of about 16°C p...
Embodiment 2
[0129] For comparison, except that laser irradiation is not carried out, other YBCO films with a film thickness of about 100nm made in the same manner as in Example 1, the Jc obtained by the induction method is within the detection limit (0.1MA / cm 2 )the following.
Embodiment 3
[0131] In addition to making the laser intensity 11mJ / cm 2 , the number of pulses is 500, and the amount of total energy is 5.5J / cm 2 In addition, other YBCO films with a film thickness of about 100 nm produced in the same manner as in Example 1 had a Jc of 1.1 MA / cm obtained by the induction method. 2 .
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Abstract
The present invention provides a process for producing a superconducting material which can produce a large-area superconducting material having improved properties with high efficiency without ablation in the thermal decomposition of an organometal compound and the heat treatment of a superconducting substance. A process for producing a superconducting coating material, comprising conducting epitaxial growth through a step (1) of coating a solution of an organic compound of a metal, of which the oxide forms a superconducting substance, onto a support and drying the coating, a prebaking step (2) of thermally decomposingan organic component in the organometal compound, and a main baking step (3) of converting the thermal decomposition product to a superconducting substance. A laser beam isapplied in a period between step (1) and step (2) under such conditions that the intensity of the laser beam, the number of pulses, and the total energy amount of the laser beam satisfy a specific mathematical formula.
Description
technical field [0001] The present invention relates to the manufacture method of the superconducting substance used in the field of electric power transmission, electric power equipment, information equipment, more specifically, relates to the superconducting material film (current limiter, microwave filter, tape material) that is coated with superconducting substance , wire) manufacturing method. Background technique [0002] Conventionally, after applying an organic compound solution containing a metal element constituting a superconducting substance on a substrate and drying it (1), the organic component decomposition step (2) (pre-firing) and superconducting Material formation step (3) (main firing) (see Patent Document 1). [0003] In addition, a method for producing metal oxides and metal oxide thin films using excimer lasers is known, which is characterized in that when producing metal oxides (which do not exhibit superconductivity), metal organic acid salts or orga...
Claims
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