ZrO2 oxygen sensor for solid state reference partial pressure of oxygen and manufacture method thereof

A technology of an oxygen sensor and a manufacturing method, which is applied in the directions of instruments, scientific instruments, analytical materials, etc., can solve the problems of strict requirements on the alignment accuracy of electrode vias, difficult sealing of reference air channels, and increased manufacturing costs, and achieves convenient Screen printing and process turnover, simple structure, high production yield

Inactive Publication Date: 2009-10-28
JILIN UNIV +1
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] 1. Each layer of the chip structure should be manufactured separately, and finally pressed into one body. The bonding of each layer during sintering is not ideal, and there is a key technical problem in the sealing of the reference air channel
[000...

Method used

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  • ZrO2 oxygen sensor for solid state reference partial pressure of oxygen and manufacture method thereof
  • ZrO2 oxygen sensor for solid state reference partial pressure of oxygen and manufacture method thereof
  • ZrO2 oxygen sensor for solid state reference partial pressure of oxygen and manufacture method thereof

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Embodiment Construction

[0022] Further illustrate the specific content of the present invention below in conjunction with accompanying drawing

[0023] The present invention adopts multi-layer casting, one-time sintering process, and the method for concrete implementation is:

[0024] 1. Preparation of cast slurry:

[0025] First, yttrium-stabilized zirconia, solid reference oxygen partial pressure material, and protective material powder were vacuum-dried at 125°C for 4 hours, and organic solvent and trihexanolamine solution were added, and after fully grinding, polyvinyl alcohol and lipid were added to plasticize The agent was continuously ground for 12 hours, and after filtration, air bubbles were removed under vacuum conditions to complete the preparation of three casting slurries.

[0026] 2. Preparation of yttrium stabilized zirconia cast layer:

[0027] Measure and adjust the gap between the scraper of the tape casting machine and the marble substrate through the grating ruler. In order to e...

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PUM

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Abstract

The invention relates to a slice type oxygen sensor used for air-fuel delivery ratio control of a vehicle engine and a manufacture method thereof. The manufacture method comprises the following steps: slurry made of yttrium stabilization zirconia powder forms a slice blank through a casting technology; Pt electrodes which have certain gaps are respectively manufactured in silk screens at both sides of the slice blank; a solid state oxygen partial pressure reference slice is prepared on the yttrium stabilization zirconia slice blank through a secondary casting technology; an RuO material heater is printed in a silk screen in the middle of a secondary casting layer, and the thickness of the layer is of 6 to 7 times of a yttrium stabilization zirconia layer; a porous protective layer is formed at the side of an outer electrode on the yttrium stabilization zirconia slice blank in a curtain coating mode; finally, a prefabricated substrate blank is punched into a strip shape according to a required size, an electrode connecting hole is manufactured, and vacuum sintering is carried out in the program temperature rising process with the temperature of as high as 1600 DEG C to manufacture a sensor chip. The method fully utilizes the curtain coating technology of ceramic slice type materials and the silk screen printing technology of slurry electrodes, and has the advantages of less production technology links, high product consistency, high yield and low cost.

Description

technical field [0001] The invention relates to an oxygen sensor and a manufacturing method thereof, in particular to a manufacturing method of a ZrO2 oxygen sensor sheet structure for solid-state reference oxygen partial pressure, which is applied to the air-fuel ratio of automobile engines to reduce exhaust pollution emissions. Background technique [0002] Three-way catalysis is an important part of automobile engines to reduce exhaust pollution emissions, and its conversion efficiency requires the engine to work at the theoretical air-fuel ratio (A / F=14.7). For the engine air-fuel ratio control system, the oxygen sensor used to measure the exhaust gas is a very important part, and the commercialized ones mainly include ZrO 2 Concentration battery type and TiO 2 There are two types of semiconductor resistors. Due to ZrO 2 The concentration battery directly outputs an electromotive force signal of 0-1V, and has a century-long theoretical and experimental research basis,...

Claims

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Application Information

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IPC IPC(8): G01N27/409
Inventor 刘海波于言杰
Owner JILIN UNIV
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