ZrO2 oxygen sensor for solid state reference partial pressure of oxygen and manufacture method thereof

Abstract

The invention relates to a slice type oxygen sensor used for air-fuel delivery ratio control of a vehicle engine and a manufacture method thereof. The manufacture method comprises the following steps: slurry made of yttrium stabilization zirconia powder forms a slice blank through a casting technology; Pt electrodes which have certain gaps are respectively manufactured in silk screens at both sides of the slice blank; a solid state oxygen partial pressure reference slice is prepared on the yttrium stabilization zirconia slice blank through a secondary casting technology; an RuO material heater is printed in a silk screen in the middle of a secondary casting layer, and the thickness of the layer is of 6 to 7 times of a yttrium stabilization zirconia layer; a porous protective layer is formed at the side of an outer electrode on the yttrium stabilization zirconia slice blank in a curtain coating mode; finally, a prefabricated substrate blank is punched into a strip shape according to a required size, an electrode connecting hole is manufactured, and vacuum sintering is carried out in the program temperature rising process with the temperature of as high as 1600 DEG C to manufacture a sensor chip. The method fully utilizes the curtain coating technology of ceramic slice type materials and the silk screen printing technology of slurry electrodes, and has the advantages of less production technology links, high product consistency, high yield and low cost.

Description

technical field [0001] The invention relates to an oxygen sensor and a manufacturing method thereof, in particular to a manufacturing method of a ZrO2 oxygen sensor sheet structure for solid-state reference oxygen partial pressure, which is applied to the air-fuel ratio of automobile engines to reduce exhaust pollution emissions. Background technique [0002] Three-way catalysis is an important part of automobile engines to reduce exhaust pollution emissions, and its conversion efficiency requires the engine to work at the theoretical air-fuel ratio (A / F=14.7). For the engine air-fuel ratio control system, the oxygen sensor used to measure the exhaust gas is a very important part, and the commercialized ones mainly include ZrO 2 Concentration battery type and TiO 2 There are two types of semiconductor resistors. Due to ZrO 2 The concentration battery directly outputs an electromotive force signal of 0-1V, and has a century-long theoretical and experimental research basis,...

AI Technical Summary

Problems solved by technology

[0008] 1. Each layer of the chip structure should be manufactured separately, and finally pressed into one body. The bonding of each layer during sintering is not ideal, and there is a key technical problem in the sealing of the reference air channel

[0009] 2. There are many process steps, the alignment accuracy requirements for electrode via holes are strict, and the yield is limited

[0010] 3. The electrode terminal material adopts integrally printed Pt material, and the production cost is relatively increased

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