Method for preparing quartz crystal microbalance humidity sensor based on sequential silica-based mesoporous materials SBA-15
A technology of humidity sensor and silicon-based mesoporous materials, applied in chemical instruments and methods, piezoelectric/electrostrictive/magnetostrictive devices, semi-permeable membrane separation, etc., can solve the problems of poor corrosion resistance and contamination resistance, Difficult to integrate, narrow measurement range and other problems, to achieve the effect of less material consumption, low cost and high sensitivity
Inactive Publication Date: 2011-03-30
SHANGHAI UNIV
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Problems solved by technology
The electrolyte humidity sensor has the disadvantages of narrow measurement range, poor repeatability, and short service life; the polymer compound humidity sensor has the advantages of good humidity sensing performance and high sensitivity, but its performance deteriorates under high temperature and high humidity conditions, poor stability, and corrosion resistance. and poor anti-contamination ability; semiconductor ceramic material humidity sensor has the advantages of good humidity sensing performance, simple production, low cost, short response time, heating and cleaning, but low accuracy, poor performance at high temperature, and difficult to integrate
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Embodiment 1
[0021] The preparation method of ordered mesoporous silicon-based material aperture SBA-15 quartz crystal microbalance sensor (QCM), its process and steps are as follows:
[0022] (1) The preparation method of SBA-15 ordered mesoporous silicon-based material: first dissolve 1.5 grams of P123 in 75ml of hydrochloric acid solution with a concentration of 1.0-2.0M, stir at 40°C for 3 hours, and then dissolve 4.3 grams of orthosilicon Hexyl ester (TEOS) was added to this solution. After the addition, the stirring was continued at this temperature for 24 hours, and then transferred to a hydrothermal kettle for crystallization at 100° C. for 24 hours. After filtering, washing and drying, the obtained product was calcined at 550° C. for 6 hours, and the desired sample was obtained after cooling to room temperature. Its pore diameter is about 7nm.
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Abstract
The invention relates to a method for preparing quartz crystal microbalance humidity sensor based on sequential silica-based mesoporous materials SBA-15, belonging to the technical field of humidity sensitive material and humidity sensor. The invention adopts the silica-based mesoporous materials SBA-15 with large specific surface areas, good absorption property, uniform bore diameters, adjustable dimensions in nanometer admeasurement and sequential structural height as the humidity sensitive materials of a quartz crystal microbalance (QCM) quality type sensor to prepare the humidity sensor. The humidity sensor has the advantages of large humidity measuring range (can be measured within a whole relative humidity range), little humidity hysteresis, fast response, high sensitivity, good repeatability, stable property, simple manufacturing technology, small material using amount, corrosion resistance, low cost, easy integrating, and the like, not only provides the very good humidity sensitive materials for the quartz crystal microbalance (QCM) quality type sensor, but also opens a new way for the application of the sequential silica-based mesoporous materials.
Description
technical field [0001] The invention relates to a preparation method of a quartz crystal microbalance humidity sensor based on an ordered silicon-based mesoporous material SBA-15, belonging to the technical field of humidity sensitive materials and humidity sensors. technical background [0002] Humidity sensor is an important type of sensor, which has a wide range of applications in storage, industrial production, process control, environmental monitoring, household appliances, and meteorology. Such as: anti-mildew of grain, greenhouse planting, manufacturing of precision electronic components, storage of aerospace missiles and rockets, high-altitude meteorological detection, etc., so research at home and abroad is very active. There are many kinds of humidity sensors, but as far as the moisture-sensitive materials used are concerned, they mainly include electrolytes and polymer compound materials, semiconductor ceramic materials, elemental semiconductors, and porous metal...
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IPC IPC(8): G01N5/02B81C5/00
Inventor 朱永恒徐甲强许鹏程张源郑琦
Owner SHANGHAI UNIV