Film solar battery and manufacturing method thereof
A thin-film solar cell and manufacturing method technology, applied in the direction of final product manufacturing, sustainable manufacturing/processing, circuits, etc., can solve problems such as unclear large-scale application prospects, and achieve easy large-scale production and application, good and stable performance, and structure. and the effect of simple craftsmanship
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[0022] Such as figure 1 As shown, the thin film solar cell of the present invention is composed of a glass substrate 1, a back electrode 2, a light absorbing layer 3, a buffer layer 4, a window layer 5, and a top electrode 6 from bottom to top.
[0023] The back electrode of the battery is a molybdenum-copper alloy film with a thickness of 0.3-3 μm, and the copper content is 2-40%; the light-absorbing layer is a copper-silicon-tin-sulfur (CSTS) film with a thickness of 0.5-5 μm; The buffer layer is a zinc sulfide (ZnS) film with a thickness of 20-100 nm; the window layer is a zinc-aluminum oxide (ZAO) film with a thickness of 0.2-5 μm; the top electrode is a nickel-aluminum alloy film , with a thickness of 0.2-5 μm and an aluminum content of 1-100%.
[0024] The manufacture method of thin-film solar cell of the present invention carries out according to the following steps:
[0025] (1) Manufacture of the back electrode: use molybdenum-copper alloy target DC magnetron sputte...
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