Microfluidic chip for enriching microorganisms in air and preparation method thereof
A microfluidic chip and microbial technology, applied in biochemical equipment and methods, biological material sampling methods, microbial measurement/inspection, etc., can solve the problems of inability to separate non-biological particles from microorganisms, large volume, incompatibility with chips, etc. problems, to achieve rapid enrichment, small volume effect
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[0031]1. Substrate preparation. Put the silicon wafer into Piranha solution (98% concentrated sulfuric acid: 30% hydrogen peroxide=7:3, volume ratio) and boil for 15 minutes. Rinse five times with deionized water, blow dry with nitrogen, and bake at 200 °C for 30 min.
[0032] 2. Shake the paint. Pour Microchem's SU-8 glue (the same below) on the center of the silicon wafer, and tilt the silicon wafer so that SU-8 covers most of the silicon wafer. Let it stand for 15 minutes while eliminating the air bubbles generated during the pouring process. Use a spin coater (Spin-Coater KW-4A, Chemat Technology, Inc.) to perform two progressive spin coatings: 500 rpm spin coating for 15 seconds, 3000 rpm spin coating for 30 seconds, and standing for 10 minutes to alleviate the edge protrusion effect .
[0033] 3. Soft baking. Gradually increase to 95°C at a rate of 5°C / min on a hot plate, during which time it is kept at 65°C and 95°C for 3 min and 6 min, respectively. Then slowly l...
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