Platinum-group metal coating on surface of refractory metal and preparation method thereof

A technology of platinum group metals and refractory metals, applied in metal material coating technology, metal layered products, coatings, etc., can solve the problems of difficult control of process parameters, slow deposition rate, high cost, etc., and achieve easy control of thickness, The effect of fast deposition speed and improved efficiency

Inactive Publication Date: 2010-07-28
NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The disadvantage of this method is that it is difficult to control the process parameters, the deposition

Method used

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  • Platinum-group metal coating on surface of refractory metal and preparation method thereof
  • Platinum-group metal coating on surface of refractory metal and preparation method thereof
  • Platinum-group metal coating on surface of refractory metal and preparation method thereof

Examples

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Effect test

Embodiment 1

[0044] The refractory metal molybdenum plate is used as the substrate, and the size is 15mm×15mm×2mm; the platinum group metal iridium plate is used as the target material, and the size is The surface of the refractory metal sample was treated with metallographic sandpaper, polished, ultrasonically cleaned with acetone or alcohol, and then dried. Install it in the vacuum chamber, adjust the distance between the poles, evacuate to the ultimate vacuum, and then pass in argon. The process parameters for preparing the platinum group metal iridium coating on the refractory metal molybdenum substrate are set as follows: the target voltage is -850V; the substrate voltage is -300~-350V, the working pressure is 35Pa, the iridium target and The distance between molybdenum substrates is 15mm, and the deposition time is 2h. Adjust the molybdenum substrate voltage to -450V first, then turn on the target power after 15 minutes, and deposit the coating according to the above-mentioned set ...

Embodiment 2

[0046] A refractory metal tungsten sample is used as a base material, and a 70% iridium+30% platinum alloy powder metallurgy disk is used as a target material. The surface of the refractory metal tungsten substrate is treated with metallographic sandpaper, polished, ultrasonically cleaned with acetone or alcohol, and then dried. Install it in the vacuum chamber, adjust the distance between the poles, evacuate to the ultimate vacuum, and then pass in argon. The deposition process parameters of the substrate: the working pressure is 45Pa, the target potential is -900V, the substrate potential is -450V, and the electrode spacing is 13mm. First adjust the voltage of the substrate to -550V, and then adjust the voltage of the substrate and the target to -450V and -900V after 20 minutes. After 2h of deposition, a dense platinum-iridium alloy coating with a thickness of 15 μm can be obtained, and the thickness of the transition layer is about 0.9 μm. The prepared platinum-iridium co...

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Abstract

The invention provides a platinum-group metal coating 30 for refractory metal 10; a 0.2 to 2mu m transition layer 20 is arranged between the platinum-group metal coating 30 and the refractory metal base material 10; in the transition layer 20, from one side of the base material of the refractory metal 10 to one side of the platinum-group metal coating 30, the platinum-group metal elements are sequentially increased until the transition layer 20 ends, the content of the platinum-group metal elements reaches 100 percent, and the thickness of the platinum-group metal coating 30 is within 100mu m. The invention provides a method of preparing the platinum-group metal coating 30 on the surface of the refractory metal 10. The method is carried out in a vacuum furnace, uses platinum-group metal as a target, the target voltage is between 0 and -1200V, the refractory metal serves as the base material, and the voltage is between 0 and -900V. Argon serves as the working atmosphere, when the vacuum indoor pressure reaches 15 to 55Pa, a DC power supply is connected, and finally the platinum-group metal coating with preferred growth orientation is finally formed through continuous sputtering and anti-sputtering, absorption and desorption.

Description

technical field [0001] The invention relates to a platinum group metal coating and a preparation method thereof, in particular to a platinum group metal coating on a refractory metal surface and a preparation method thereof. Background technique [0002] Among various materials, refractory metals are the earliest researched and applied ultra-high temperature materials. Generally, refractory metals such as Nb, Mo, W, and Re are the most researched and applied. Refractory metals have been widely used in various spacecraft and engines. Refractory metals have excellent high-temperature strength, corrosion resistance, and high-temperature resistance. However, when the temperature is above 1000°C, the material will fail due to oxidation, which affects the development of refractory metal materials. Platinum group metal coatings (iridium, platinum, ruthenium, rhodium, osmium, and palladium) are used to improve the high-temperature oxidation resistance of refractory metals, such as...

Claims

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Application Information

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IPC IPC(8): C23C14/16C23C14/34B32B15/01
Inventor 陈照峰吴王平丛湘娜王亮兵
Owner NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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