Normal temperature bonding technology-based microminiature fuel cell encapsulation method
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- TSINGHUA UNIV
- Publication Date
- 2012-11-14
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Abstract
Description
technical field
[0001] The invention belongs to the field of microfluidics and micromachining and system technology, and in particular relates to a micro-miniature fuel cell packaging method based on room temperature bonding technology. Background technique
[0002] In recent years, various micro-devices based on MEMS (Micro-Electro-Mechanical Systems, Micro-Electro-Mechanical Systems) technology have developed rapidly and have been widely used, but the development of corresponding micro-energy devices is relatively slow. The energy devices of common micro devices are larger in size, several times larger than working devices, which seriously weakens the advantages of micro devices and micro systems in terms of miniaturization and high integration. In recent years, with the rapid development of portable devices such as mobile phones and notebook computers, micro fuel cells with small volume and high energy density are being widely studied. However, the current encapsulation ...