Friction induction-based single crystal quartz surface selective etching method

A single crystal quartz, friction-induced technology, applied in crafts for producing decorative surface effects, decorative arts, gaseous chemical plating, etc., can solve problems such as plastic deformation, scanning probe wear, large wear debris, etc. Precise and controllable etched shape, improved processing efficiency and less wear
CN101973507BInactive Publication Date: 2012-07-11SOUTHWEST JIAOTONG UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
SOUTHWEST JIAOTONG UNIV
Publication Date
2012-07-11
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a friction induction-based single crystal quartz surface selective etching method. The method comprises the following steps of: arranging a probe with ball coronary tip on an atomic force microscope, fixing single crystal quartz on a sample platform, starting the atomic force microscope, and applying constant load F or variable load F' to the probe, wherein the value of the F or the variable range of the F' is 0.03 to 0.14 times critical load Fy of yield on the quartz surface; performing scanning on the surface of the single crystal quartz along the set track and cycletimes by the probe; and after scanning, corroding the single crystal quartz for over 2.5 hours by using 15 to 25 percent KOH solution. The method can effectively perform nano processing by combining scanning under extremely low load and subsequent corrosion, does not need a mask or repeated corrosion, and can process a multistage nano structure. The method does not damage or pollute the structureand the surface outside the processed area, and is a simple, accurate and clean nano quartz processing method.
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Description

technical field

[0001] The invention relates to a micro-nano processing method of quartz. Background technique

[0002] Micro-nano devices are widely used in advanced manufacturing, aerospace, military, biotechnology, computer and communication and other fields. Quartz not only has good electrical insulation and chemical stability, but also can easily convert acceleration, pressure, etc. into electrical signals, and is a piezoelectric material with excellent performance. Therefore, quartz is an important material for the manufacture of micro-nano devices, and is often used to manufacture micro-accelerometers, micro-pressure sensors, biochips, and insulating substrates for micro-electromechanical systems.

[0003] According to different processing principles, the current processing methods for quartz micro-devices mainly include: (1) Focused ion beam processing: use an external high-voltage electric field to accelerate metal ions, and form a directional high-energy ion beam ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
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