Application of a diamond-like film on the impeller
A technology of diamond film and impeller, which is applied in the coating process of metal materials, components of pumping devices for elastic fluids, gaseous chemical plating, etc., can solve the problems of fan impeller channel fouling, etc., and achieve simple equipment, Low coefficient of friction, easy handling effect
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Embodiment 1
[0019] Coating is divided into two steps: the outer surface of the impeller and the inner coating of the flow channel.
[0020] When coating the outer surface of the impeller, first clean the impeller as a whole with Ar ions for about 120 minutes, use a voltage of 5KV (adjustable according to the size of the vacuum furnace and the size of the impeller), and the Ar pressure is about 15 millitorr; then the flow channel is sealed with aluminum foil. Use Ar ions to clean the outer surface of the impeller, the voltage is 3.5-5KV (adjustable according to the size of the vacuum furnace and the impeller), the Ar pressure is 15 millitorr during cleaning, and the cleaning time is 120 minutes; then the outer surface is coated with a transition layer, after Comparison of various transition layer gases Finally, TMS is selected as the transition layer gas to generate the SiC transition layer, the voltage is selected as 5KV, the air pressure is about 15 mTorr, and the transition layer plating...
Embodiment 2
[0026] A one-time DLC coating is applied to the impeller as a whole. The impeller is made of KMN material. In this process, we use another patented technology of the Southwest Research Institute of the United States: a wire mesh cover is placed around the impeller. The distance between the net cover and the surface of the impeller is 80 mm, and the diameter of the metal wire is about 0.3 mm. The application of the net cover type coating can increase the ion density in the net cover, enhance the uniformity of the electric field, avoid arc discharge, and then realize the one-time coating of the whole impeller. The specific process and parameters are as follows:
[0027] First, the impeller in the vacuum furnace is cleaned with Ar ions as a whole. The selected voltage is 5.3 kV, the cleaning time is 150 minutes, and the Ar pressure is 15 millitorr. After ion cleaning, TMS gas is introduced, and the discharge voltage is maintained at 5.3 kV. During this period, the pressure of TM...
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