Device and method for laser etching OLED display anode thin film material

Abstract

The invention relates to a device and a method for laser etching the anode film material of an OLED display. The output end of the high-frequency short-pulse laser is arranged with an electric shutter, the output end of the electric shutter is provided with an electric beam expander, and the output end of the electric beam expander A 45-degree total reflection mirror is arranged in sequence, and the output end of the 45-degree total reflection mirror is arranged with a vibrating mirror and a scanning field mirror. The scanning field mirror is facing the three-axis adsorption platform, and one side of the three-axis adsorption platform is equipped with an ion wind blower system, the dust collection system is installed on the other side, the CCD alignment observation system is installed at the diagonal positions on the three-axis adsorption platform, and the high-frequency short-pulse laser and the vibrating mirror are connected to the industrial computer. Using high-frequency pulsed lasers of different wavelengths as the laser source, laser etching is performed on the anode material of the OLED display, so that the anode material of the OLED display is vaporized under the action of the high-frequency short-pulse laser to achieve the purpose of erosion, and the processed product is pollution-free. , OLED display products with stable linearity and good functions.

Description

technical field [0001] The invention relates to a micro-machining method and equipment for using a laser to etch an anode film material of an OLED display. Background technique [0002] In recent years, organic light emitting diode (OLED) has become a very popular emerging flat panel display industry, mainly because OLED displays have self-illumination, wide viewing angle (over 170 degrees), and fast response time (on the order of 1 μs). , high luminous efficiency, low working voltage (3-10V), thin panel thickness (less than 2mm), large-size and bendable (flexible) panels can be produced, the process is simple, and it has low-cost potential (expected to be lower than TFT- LCDs are about 20% cheaper). [0003] The OLED device structure can be roughly divided into four main areas: substrate, cathode, organic light-emitting material and anode. In order to effectively inject electrons or holes into organic materials, as mentioned above, lowering the injection energy barrier i...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to overcome the deficiencies in the prior art, to provide a device and method for laser etching the anode film material of OLED display, to realize etching the anode of OLED display, to obtain thinner and more stable line width, and not Damage the substrate, so as to overcome the shortcomings of traditional chemical wet etching methods such as complex and cumbersome procedures, difficult spacing control, poor selectivity, and environmental pollution

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