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High-stability optical fiber Fabry-Perot pressure sensor packaged without glue and manufacturing method

A technology of pressure sensor and glue-free packaging, which is applied in the application of optical methods for fluid pressure measurement, measurement of fluid pressure, measurement of fluid pressure through electromagnetic components, etc., which can solve the problem that it is not suitable for mass production, the temperature and humidity characteristics of the sensor are unfavorable, and it cannot be used. The mechanical properties of monocrystalline silicon wafers and other issues can achieve the effect of improving sensing accuracy and reducing costs

Active Publication Date: 2012-03-21
TIANJIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, most diaphragm optical fiber Fabry-Perot sensors are packaged with glue, which is not good for the temperature and humidity characteristics of the sensor. Quartz material, monocrystalline silicon wafers with better mechanical properties cannot be used, and it is not suitable for mass production

Method used

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  • High-stability optical fiber Fabry-Perot pressure sensor packaged without glue and manufacturing method
  • High-stability optical fiber Fabry-Perot pressure sensor packaged without glue and manufacturing method
  • High-stability optical fiber Fabry-Perot pressure sensor packaged without glue and manufacturing method

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0038] Embodiment 1: The specific implementation of the first optical fiber Fabry-Perot pressure sensor

[0039] Such as figure 1 As shown, the fiber optic Fabry-Perot pressure sensor consists of a sensor head, a sensor body 7 and a transmission fiber 9 . The sensor head consists of a four-layer structure, the first layer is the first monocrystalline silicon wafer 1, the second layer is the first Pyrex glass wafer 2, the third layer is the second monocrystalline silicon wafer 4, and the fourth layer is the second Pyrex glass wafer. Glass sheet 5. The first single crystal silicon wafer 1 is used as an elastic diaphragm to feel the pressure, and the rear surface 14 of the first single crystal silicon wafer simultaneously constitutes the first reflection surface of the Fabry-Perot cavity; the first Pyrex glass wafer 2 is annular , a through hole 3 is processed in the middle, and the thickness of the first Pyrex glass sheet 2 determines the initial length of the Fabry-Perot cavi...

Embodiment 2

[0046] Embodiment 2: The specific implementation of the second optical fiber Fabry-Perot pressure sensor

[0047] Such as figure 2 As shown, the fiber optic Fabry-Perot pressure sensor consists of a sensor head, a sensor body 7 and a transmission fiber 9 . The sensor head consists of a two-layer structure, the first layer is a single crystal silicon wafer 1, and the second layer is a Pyrex glass wafer 2. The monocrystalline silicon wafer 1 is used as an elastic diaphragm to feel the pressure, and the inner surface 14 of the monocrystalline silicon wafer simultaneously constitutes the first reflection surface of the Fabry-Perot cavity; the Pyrex glass wafer 2 is processed with a through hole 3, the thickness of which is determines the initial length of the Fabry-Perot cavity. The monocrystalline silicon wafer 1 is anodically bonded on the Pyrex glass wafer 2, and the outer surface of the monocrystalline silicon wafer 1 of the sensor head is roughened by using a Nd:YAG laser ...

Embodiment 3

[0052] Embodiment 3: Cavity length demodulation of fiber optic Fabry-Perot pressure sensor

[0053] The sensing system of fiber optic Fabry-Perot pressure sensor such as image 3 As shown, the light emitted by the cavity length demodulated broadband light source 16 enters the sensor 18 through the circulator 17 , passes through the Fabry-Perot cavity of the sensor, and then enters the spectrometer 19 through the circulator 17 . The spectrum returned by the sensor is obtained by scanning the spectrometer 19, and the cavity length information of the optical fiber Fabry-Perot pressure sensor can be obtained by calculating the peak position of the spectral envelope, and the relationship between the Fabry-Perot cavity length and its interference spectrum The relationship is: where d is the Fabry-Perot cavity length λ 1 ,λ 2 represent the two peak positions of the spectral envelope, respectively. The Fabry-Perot cavity length can be converted into pressure information, and the ...

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Abstract

The invention provides a high-stability optical fiber Fabry-Perot pressure sensor packaged without glue and a manufacturing method. The sensor comprises a sensor head, a sensor body with a through-hole in middle, and an optical fiber, wherein a four-layer structure (comprising a first monocrystalline silicon piece, a first Pyrex sheet glass, a second monocrystalline silicon piece and a second Pyrex sheet glass) is adopted by the sensor head; a first reflecting surface of a Fabry-Perot cavity is formed by the back surface of the first monocrystalline silicon piece; the second monocrystalline silicon piece is used for providing a second reflecting surface of the Fabry-Perot cavity; the second Pyrex sheet glass is in butt fusion with the sensor body; and the optical fiber is fixedly arrangedin the sensor body by adopting a CO2 laser, and thereby non-glue packaging is realized. When the first layer of monocrystalline silicon piece is deformed by external pressure changes, the length of the optical fiber Fabry-Perot cavity is changed; and after a broadband light source is accessed to the sensor, the change of the cavity length can be extracted through collecting a reflection spectrum of the sensor or extracting low-coherence interference fringes of the sensor, and thereby pressure information is obtained. By adopting the structure, the influences of environmental changes such as the temperature, the humidity, and the like can be effectively eliminated, and the measurement accuracy can be greatly improved.

Description

【Technical field】: [0001] The invention relates to the technical field of optical fiber pressure sensors, which can be used to detect relative pressure and absolute pressure of liquids and gases, and can also be used to detect sound waves, ultrasonic signals and the like. 【Background technique】: [0002] Optical fiber Fabry-Perot pressure sensor is a kind of optical fiber pressure sensor. It usually consists of an optical fiber end face and a diaphragm end face to form a Fabry-Perot microresonator cavity. When the pressure acts on the diaphragm, the diaphragm will be deformed. , so that the length of the Fappel cavity changes, so as to realize the sensing. Some designs have been proposed in recent years, such as Don C.Abeysinghe et al. in 2001 (Don C.Abeysinghe, Samhita Dasgupta, Joseph T.Boyd, Howard E.Jackson, A Novel MEMS pressure sensor fabricated on an optical fiber, IEEE Photonics Technology Letters , 2001, 13(9): 993-995) etched microcavities on the end faces of mult...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L11/02
CPCG01L11/02G01L11/025G01L9/0079G02B26/001G02B5/284G02B5/28G02B6/29358
Inventor 江俊峰刘铁根尹金德刘琨刘宇
Owner TIANJIN UNIV
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