Sample processing method for detecting boron in industrial silicon with graphite furnace atomic absorption spectrometry

Abstract

The invention discloses a sample processing method for detecting boron in industrial silicon with graphite furnace atomic absorption spectrometry. The method comprises the following steps: weighing proper sample silicon powder; selecting proper acid to digest and dissolve the sample; heating to volatilize the silicon, and separating the residue; and filtering to obtain a clear solution and adding Zr-Ba serving as a proper matrix modifier to suppress the interference of a matrix. The method disclosed by the invention can be used for increasing the measurement sensitivity of the graphite furnace atomic absorption spectrometry and improving precision, is high in measurement speed, small in interference, high in accuracy and low in measurement cost, and is especially suitable for the quality detection in an industrial silicon production enterprise.

Description

Technical field [0001] The invention relates to element detection of chemical raw materials, in particular to a sample processing method for determining boron in industrial silicon by graphite furnace atomic absorption spectrometry. Background technique [0002] With the development of the electronics industry, industrial silicon as a raw material is widely used in the field of semiconductor manufacturing. Based on the required physical properties of its semiconductor materials, the requirements for impurity elements in industrial silicon materials are very strict, so the detection of its impurities is very strict, and there are strict requirements for its limits. As boron and phosphorus have the greatest impact on the performance of industrial silicon, boron, as a common element in nature, is generally distributed in the soil. In the past, the determination of boron in silicon is relatively rare. The analysis method is mainly ultraviolet absorption method and neutron Activation...

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Problems solved by technology

Their shortcomings: 1 pair of operating conditions, high requirements on environmental conditions, many interfering ions, and poor reproducibility

[0005] There is also a small amount of application in the determination of graphite furnace atomic absorption method, but because the memory effect is serious when measuring boron, and boron is a high-temperature element, its atomization temperature is very high, which will seriously affect the service life of the graphite tube, and it is also easy to make it The loss of boron oxide and the generation of hard-to-dissociate boron carbide, so it is necessary to add a matrix modifier and coat the graphite tube. The existing modifier Ca-Mg, such as "Boron's Atomic Absorption Spectrometry Determination" (rock Mine test, Jiang Yongqing Yao Jinyu, Changchun Institute of Applied Chemistry, Chinese Academy of Sciences), using this improver, although its test sensitivity is high, the measurement repeatability is poor, and the accuracy is not good

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